AVS1998 Wednesday Afternoon

Changes in the Band Structure Across the Surface Ferroelectric Phase Transition in the Crystalline Ferroelectric Copolymer P(VDF-TrFE)

UV Photopolymerization of Methyl Methacrylate and Acrylic Acid on Pt(110) Using Time-Resolved FT-IRAS

Correlations of the Structure and Mechanical Properties of Polymer Surfaces: Combined Sum Frequency Generation-Surface Vibrational Spectroscopy and Atomic Force Microscopy Studies

Hydrolysis Degradation of Biodegradable Polymers A Time-of-Flight Secondary Ion Mass Spectrometry Study

Effect of PDMS Segment Length on the Surface Composition of Polyimidesiloxane Copolymers and its Role in Adhesion

Interface Characterization with Combined XPS and TOF-SIMS An Application to the Metallization of Plasma Modified Polymer Surfaces

XPS Evidence of Redox Chemistry Between Cold Rolled Steel and Polyaniline

Evaluation of the Degradation Mechanism(s) Associated with Acid Rain Exposure of Acrylic Melamine Based Automotive Clearcoats

Optical Characterization of FEP Teflon: Pristine and from Hubble Space Telescope¹

Understanding the Evolution of Surface Morphology during Chemical Etching

Structure of a Passivated Ge Surface Prepared from Aqueous Solution

Reflectance Difference Spectroscopy of Ge / Si(001)

Second Harmonic Study of Ge/Si(100) and Si_1-xGe_x(100) Films

Silicon Epoxide: Fundamental Intermediate in Si(100) Oxidation

Structure of Ultrathin Silicon Oxide - Silicon Interfaces Studied by Ultraviolet Photoelectron Spectroscopy

Influence of Rapid Thermal Annealing on Vicinal Si(111)/SiO₂ Interfaces Investigated by Optical Second Harmonic Generation.

The Initial Stages of Si(100) Oxynitridation by NO: An Infrared Study

Growth and Analyses of Silicon Nitride Thin Films on Si(111) and Si(100)

Oscillating Contrasts Surrounding Charged Defects and Dopant Atoms in (110) Surfaces of III-V Semiconductor at Room-Temperature

Two-Dimensional Carrier Profiling of III-V Structures using Scanning Spreading Resistance Microscopy

The Structure of InAs/AlSb/InAs Surfaces and Interfaces Grown by MBE

In-Situ STM of MBE Growth Quality for GaAs(001) and InP(001)*

Structural and Morphological Studies of GaN Heteroepitaxy on SiC(0001)

Impact of Deposition Method on the Microstructural and Electrical Properties of Thin Film Silica Aerogels

UHV STM Nanofabrication and the Giant Deuterium Isotope Effect: Applications to CMOS Technology

Scanning Probe Microscopy Imaging of IC Cross Sections

Silicon Nitride Islands as Oxidation Masks for the Formation of Silicon Nano-Pillars

Using the Magnetic Force Microscope as a Quantitative Micromagnetic Probe

Imaging Current Flow in Polycrystalline Bi2Sr2CaCu2Ox Superconductors by Magnetic Force Microscopy

Imaging Magnetic Domains by Spin-Polarized Scanning Tunneling Spectroscopy

Imaging Magnetization in Fe and Layered Fe/Co Films Using an Element-Specific Scanning Transmission X-Ray Microscope

Substrate and Growth Related Nanostructural and Magnetic Properties in La_{0.67√sub 0.33}MnO₃ Thin Films

Monodisperse Cobalt Nanocrystals and Their Assembly into Nanocrystal Superlattices: Building with Magnetic Artificial Atoms

Fabrication and Characterisation of Micron Scale Magnetic Features

Domain Behavior in Magnetic Nanostructures as Revealed by MOIF Observations

Factory Implementation of Process Control: Technical or Cultural Challenge?

Advanced Process Control and Sensor Requirements for Reducing Non-Product Wafer Usage and to Increase Tool OEE in 300mm Manufacturing

Process Module Control Technology for 300mm Plasma Processing

Using Wafermap Data for Automated Yield Analysis¹

Visual Data Mining of Defectivity Data using Parallel Coordinates

Surface Reactions and Hydrogen Coverage on Plasma Deposited Hydrogenated Amorphous Silicon and Nanocrystalline Silicon Surfaces

Gas Phase and Surface Kinetics in Plasma Enhanced Deposition of Silicon Nitride: Effect of Gas Dilution on Electron Energy Distribution, Radical Generation, and Film Composition

Atomistic Simulation of Plasma Enhanced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Films

The Ion-assisted Etching and Profile Development of Silicon in Molecular and Atomic Chlorine: Experiment, Modeling, and Simulation

The Role of Etching Products on the Chemical Composition and Thickness of the Chlorinated Surface Layer That Forms During Etching of Silicon in a Chlorine Plasma

Reactive Ion Etching of Si by Cl, Cl₂, and Ar Ions: Molecular Dynamics Simulations with Comparisons to Experiment

Investigation of Si-poly Etch Process for 0.1 µm Gate Patterning and Beyond

Mechansims in High Aspect Ratio Oxide Feature Etching using Inductively Coupled Fluorocarbon Plasmas

Surface Reactivity of CF and CF₂ Radicals Measured Using Laser-Induced Fluorescence and CHF₃ Plasma Molecular Beams

Optical Monitoring of Surface Adlayers by Laser-induced Thermal Desorption during Plasma Etching of Si and Ge

UHV Arcjet Atomic Nitrogen Source: Beam Characterization and GaN Epitaxial Growth

Flow Characteristics of a UHV Nitrogen Arcjet

Gas-Phase Diagnostics for Wide Bandgap Semiconductor Development

Fast Deposition of Amorphous Hydrogenated Silicon and Carbon

Inexpensive Corona Discharge Source for the Growth of III-N Semiconductors

Development of Atomic Nitrogen Sources and Atomic Nitridation Processes

Energetic Oxygen Atom Surface Passivation of Cd_1-xZn_xTe Radiation Detectors

The Atmospheric-Pressure Plasma Jet: Properties and Materials Applications

Quantifying Surface Electromigration: Si(111) as a Model System¹

Electromigration and Cluster Motion¹

Theory of Surface Electromigration on Metals

Theory of Surface Electromigration on Stepped and Islanded Surfaces.

Surface Electromigration Processes on Gold and Copper Films

Molecular Dynamics Studies of Interlayer Mass Transport and Dendritic-to-Compact Morphological Transitions during Submonolayer Growth on Pt(111) Surfaces

Edge Barriers and Mass Transport on Metal (100) Surfaces¹

Metal Row Growth on a High-Index Silicon Surface

One Dimensional Growth Behavior of Xe Atoms on Step Edges of Cu(111)

Photochemical Routes to Group IV Deposition

Electron Induced Deposition of Germanium on Si(100): TPD, XPS, and HREELS Study

Photodesorption of Condensed Gases by Lyman-α

Photodesorption of Positive Ions from Oxyanion-Containing Inorganic Crystals

Direct Observation of Synchrotron-Radiation-Stimulated Decomposition of SiO₂ Thin Films on Si(111) Surfaces using Scanning Tunneling Microscopy

Surface Decomposition Reaction of Trisdimethylaminoantimony on GaSb(100)-(3x1)

Interaction of Ethylene with the Ge(100)-2x1 Surface: Coverage and Time-Dependent Behavior

Interaction of Amines with Hydrogen on Al(111)

Adsorption and Reaction of Chlorine on Low Index Diamond Single Crystal Surfaces

Desorption Kinetics of Hydrogen and Deuterium from Diamond (111)x(1x1) via Helium Atom Scattering

Preferential Sputtering Effects in Thin Film Processing

Measurements and Modeling of Ti and Ta Sputtering as a Function of Target Microstructure and Temperature

Reactor-Scale Models for Rf-Diode Sputtering for GMR Thin-Film Growth

Using Pulsed DC Power for Reactive Sputtering of Al₂O₃

Suppression of Hillocks and Whiskers on Al Films Deposited onto a Glass

Substrate Bombardment and Heating in Dual Magnetron Sputtering Using Mid-Frequency AC

A Novel Approach to Collimated Physical Vapor Deposition

Microcrystalline Silicon Thin Films Deposited By Low Temperature Reactive Magnetron Sputtering: The Effect Of Using Deuterium vs. Hydrogen

Atomistic Simulations of the Sputter Deposition of Copper

Design and Installation of a Low Particulate, Ultra-High Vacuum System for a High Power Free Electron Laser

Vacuum Instrumentation and Control System for the Relativistic Heavy Ion Collider

An Ultra-High Vacuum System for Hydriding Rare Earth Metal Films

Thermal Stability and Sealing Performance of Perfluoroelastomer Seals as a Function of Crosslinking Chemistry

Vacuum Insulation, 100 years of Cryogenics, and Clean Ultra High Vacuum

Method for Measuring Deuterium in Erbium Deuteride Films

Characterization of Aluminum Materials Focusing Electron Stimulated Gas Desorption and Its Surface Analysis in Surface Treatment Techniques