AVS1998 Thursday Morning

Resolution Enhancement of XPS Spectra by Maximum Entropy Deconvolution

Evaluation of Calculated and Measured Electron Inelastic Mean Free Paths

Development of Well Defined Reference Samples for ARXPS Depth Profiling Studies

Trajectory Projection Factor Analysis

Quantitative High-Resolution Imaging with Sputter-Initiated Resonance Ionization Spectroscopy

Quantitative Detection of Metals in Organic Matrices by Laser-SNMS

Air-Stable Sulfur-Based Passivation of III-V Compound Semiconductor Surfaces

Development of Surface Morphology During H₂ Plasma Processing of GaAs(001)

Thermal Chemistry and Photochemistry of Organothiols Chemisorbed on GaAs(110)

The Surface Structures of In_xGa_1-xAs_yP_1-y (001) Films Grown by Metalorganic Vapor-Phase Epitaxy

Low Induced Damages Dry Etching of III-V Materials for HBT Applications using ICP in Chlorinated Plasma

Variable Substrate Temperature for Precise Growth of II-VI Interfaces

Effect of Surface Interactions on Band Offsets at Buried Semiconductor-Insulator Interfaces

Comparison of Morphology and Interfacial Composition of Pd Ultra-thin Films on 6H- and 4H-SiC at Different Annealing Temperatures

Field Emission Studies of BN Overlayers on Various Substrates

Influence of Ammonia Surface Reactions in GaN Chemical Vapor Deposition

Optimization of the Nitridation of Sapphire Substrates Using a Fractional Factorial Designed Experiment

Growth and Characterization of Ba_{0.6√sub 0.4}TiO₃ Thin Films on Si with Pt Electrodes

Synthesized Single Crystalline Ba_{(1-x)√sub x}TiO ₃ Thin Films for DRAM Application

Scanning Capacitance Imaging for Evaluation of High-k Dielectric Oxide Materials

Characterization of Thermal Annealing of Tantalum Pentoxide for High-k Dielectric Applications

Structural Properties of Ultrathin Films of High Dielectric Constant Materials on Silicon

Etching of High Dielectric Constant Materials for DRAMs and Ferroelectric Materials for FeRAMs

Patterning of Reactively Sputtered Tantalum Pentoxide, a High Epsilon Material, by Plasma Etching

The High Temperature Platinum Etching Using Titanium Layer

Removal of Sidewall Re-depositions Formed by Reactive Ion Etching of Platinum for Embedded DRAM Applications

Study on Surface Reaction of (Ba,Sr)TiO₃ Thin Films by High Density Plasma Etching

Magnetic Characterization from Polarized Soft X-ray Scattering

Magnetic Structure of Cr Layers in Fe/Cr(001)Superlattices from X-ray Magnetic Dichroism

On the Nature of Resonant Photoemission in Gd

Combined Spin Polarized Photoemission and Inverse Photoemission of Rare Earth Surface States

X-ray Dichroism Studies of Induced Magnetism in Magnetic Multilayers

A Controversy Over the Magnetic Structure of Mn Overlayers on Fe and the Role of Oxygen Impurities¹

Morphology of Mn Films on Fe(001)¹

Light Scattering Cross Section for Mode Crossing of Spin Waves in Magnetic Films

RF Monitoring of PECVD Tools in a Manufacturing Environment

Advances in Broadband RF Sensing for Real-time Control of Plasma-Based Semiconductor Processing

NOVA In-Line CMP Metrology and Its Use for Lot-to-Lot Process Control

In Situ CD Measurement during Post Exposure Bake

Process Environment Monitoring of Plasma Etching for Advanced Process Control

Improvement of Process and Equipment Performance Using Online and Real Time Optical Emission Spectroscopy

Multivariate Spectral Analysis of Optical Emission Spectroscopy for use in Low-Open Area Endpoint Detection

Simulations of the Performance of Novel Ion Current Sensors

Fabrication of Nanometer Size Photoresist Wire Patterns with a Silver Nanocrystal Shadowmask

Fabrication and Structuring of Ordered Two-Dimensional Nanopore Arrays in Anodic Alumina

Chemically Assisted Ion-Beam Etching of Submicrometer Features in GaSb-based Quantum Wells

Nanometer-scale Sputter-Induced Rippling of the SiO₂ Surface Characterized with Real-Time X-ray Scattering

Materials Considerations for Optical Lithography at the Nanometer Scale

Nanofabrication of Organic Thin Film Materials Using Scanning Probe Lithography

Proximity X-ray Lithography of Siloxane and Polymer Films Containing Benzyl Chloride Functional Groups

Nanofabrication of Apertures for Single Quantum Dot Spectroscopy

Nanolithography and Macromolecular PMMA

Indium Phosphide Nanocrystals formed by Sequential Ion Implantation into Fused Silica

Plasma Processes for Copper Dual Damascene Interconnect in Advanced CMOS Technologies

Low k Dielectric Etching in High Density Plasmas

High Density Plasma Patterning of Organic Low Dielectric Constant Materials

Plasma Deposition of Low-Dielectric-Constant Fluorinated Amorphous Carbon Interlayer Dielectrics

Sources of Asymmetry in Ionized Metal PVD Reactors¹

Simulations for Process Optimization Issues in Ionized Metal PVD

Modeling of IMP Copper for Electroplating Seed Layer Application

Metal Flux Ionization Fraction in Copper Ionized Physical Vapor Deposition¹

Scattering and Sputtering Processes of Energetic Ar⁺ and Cu⁺ Ions on Cu Surfaces: Molecular Dynamics Simulations

Low Energy Electron Microscopy of SEED Growth of GaN Layers

Observation and Nucleation Control of Ge Growth on Si Surfaces using Scanning Reflection Electron Microscopy

Wurtzite GaN Surface Structure Studied by Scanning Tunneling Microscopy and Total Energy Calculations

Low-Energy Electron Microscopy of (0001) Surfaces of GaN Films^1,2

Defect-Driven Nucleation Kinetics of GaN Growth on Sapphire(0001)

Site-Selective Reaction of Br₂ with the Second Layer Ga Atoms on the As-rich GaAs(001)-2x4 Surface

Peter Mark Memorial Award Address - Morphology of Epitaxial Films during Low Temperature Growth

The Influence of Dislocations on the Intermixing Kinetics of Pd-Au Monolayer Films

The Kinetic Nature of Slope Selection during Unstable Growth

Growth on Cu(100) Using Improved Simulation Algorithm¹

The Atomistics of Homoepitaxial Growth on bcc(110)-Surfaces

Probing the Forces Stabilizing Self-Assembled Structures: Dynamics of Vacancy Island Lattices in Ag films on Ru(0001)

STM Study of Ultrathin NaCl(111) Layers on Aluminum

Three-Dimensional SiGe Island Density on Si(001) and Morphology After Si Overgrowth¹

Effects of Ion Pretreatments on the Nucleation of Silicon on Silicon Dioxide

Coadsorption Studies with Water: a Small Step Toward Understanding the Surface Chemical and Photochemical Properties of TiO₂

HCl Adsorption and Desorption on a Single-Crystal α-Al₂O₃(0001) Surface

Dissociative Adsorption and Electron Stimulated Desorption of Cl on TiO₂(110) Studied by STM, AES and ISS

Photocatalytic Dehydrogenation of 2-Propanol on TiO₂(110)

Photo-stimulated NO Adsorption on Metal Oxides

The Reaction of H₂S, S₂ and SO₂ with ZnO and Cu/ZnO Surfaces

Methanol Adsorption and Reactivity at U and UO₂ Surfaces

The Chemistry of CeO₂(001) and Ce_1-xZr_xO₂(001) Studied by Mass-Spectroscopy of Recoiled Ions

Reduction of Trace Element Contaminants in Aqueous Solution by Iron and Iron Oxides

Formation of Nitro-PAH on Flyash Particle Surfaces: The Significance of Particle Substrate on PAH Nitration

New Dry Etch Applications for Amorphous TFTs in Flat Panel Displays(FPD)

Field Emission and Photo Emission from Si Micro Tip Arrays Coated with Bias-Grown Diamond Films

Hydrogen Concentration Distribution in Plasma Deposited Hydrogenated Amorphous Silicon and Silicon Nitride Films

Poly-Si Thin Film Transistors Fabricated on Low Temperature Plastic Substrates

Stability of Very Low Temperature Amorphous Silicon Thin Film Transistors on Flexible Plastic Substrates

Advanced Deposition Technique for Producing Thin Films of Polycrystalline Silicon

Polycrystalline Silicon Films Deposited Directly on Glass by Reactive Magnetron Sputtering Using a Microcrystalline Silicon Nucleation Layer