AVS1998 Thursday Afternoon

Sputtering Rate Change and Surface Roughening in SIMS Measurements Using Oblique and Normal Incidence Oxygen Bombardment, With and Without Oxygen Flooding

Secondary Ion Mass Spectrometry of Deep Trench Capacitors in Dynamic Random Access Memory

TOF-SIMS Depth Profiling of Novel Si Devices

Nitrogen Incorporation and Trace Element Analysis of Nanocrystalline Diamond Thin Films by SIMS

Quantitative ToF-SIMS Analysis of Industrial Polymers

Secondary Ion Emission from Molecular Surfaces and Overlayers under Noble Gas and Molecular Primary Ion Bombardment

Coincidence Counting in Highly Charged Ion Based Time-of-Flight Secondary Ion Mass Spectrometry

Short Range Order and Electronic Structure of Amorphous Silicon Oxinitride

Cathodoluminescence Spectroscopy of Nitrided Si-SiO₂ Interfaces

Reliability of Ultra-thin Gate Dielectric formed with Nitrogen Implantation and Thermal Oxidation

Effect of Substrate Temperature in SiO_xN_y Films Deposited By Electron Cyclotron Resonance

Roughness at Si/SiO₂ Interfaces and Silicon Oxidation

Energy Dispersion of the Conduction Band Mass in Ultrathin SiO₂ Gate Oxides

Ultra Thin Silicon Oxide Film on Si(100) Fabricated by High Purity Ozone at Atmospheric Pressure

Mixed Silicon Dioxide / Tantalum Oxide Layers for High k MOS Gate Dielectrics Formed by Plasma Oxidation of Si and Ta Using a rf Remote N₂O Plasma Source

Thermal Stability of a-SiNx:H Films Deposited by Plasma Electron Cyclotron Resonance

In-Situ IR Spectroscopic Study of the Chemical Process of Si-Related CVD Thin Films

Integrated Real-Time Spectroscopic Ellipsometric and Reflectance Difference Measurements on a Commercial OMCVD Reactor

Real-Time Optical Control of Ga_1-xIn_xP Film Growth by P-Polarized Reflectance

Electron Cyclotron Resonance Induced Surface and Subsurface Defects in GaAs Exposed to a Chlorine/Ar Plasma

Reciprocal-Space Analysis of Optical Spectra

Observation of Adsorption and Reaction of NH₃ on Al₂O₃, AlN and AlON Under Steady-State Conditions Using IRRAS

Time of Flight Mass Spectroscopy of Recoiled Ions Comparative Studies of Gallium Nitride Thin Film Deposition By Various Molecular Beam Epitaxial Methods

Near-Surface Variation of Gallium Nitride Cathodoluminescence with Annealing

In-situ Formation, Reactions, and Electrical Characterization of MBE Grown Metal/Semiconductor Interfaces

Exchange Coupling in Co/Au/Co Sandwiches

Experimental and Model Theoretical Dispersions of Unoccupied Metallic Quantum Well States in Cu/fccCo/Cu(100) and Related Systems

Spin-Polarized Quantum Well States

Systematic Measurement of Exchange Coupling Across the Periodic Chart of 3-d Transition Elements to Understand Magnetization In Ferromagnetic Mn Alloys¹

Epitaxial Fe and Co Layers on Cu Crystals

Fermi Surface Study of Pseudomorphic Fe_1-xNi_x and Co_1-xNi_x Thin Films on Cu(100)

Growth Study of FePt(001) L1_0 ordered alloys using a Temperature Wedge Method

The Effect of Oxygen on the Growth and the Surface Magnetism of Iron Films

Magnetic Properties of Ultrathin Fe/Gd and Gd Thin Films

Nanomanipulation for Material Properties, Interactions and Devices

Monitored Mechanical Nano-Manipulation

Field-Induced Manipulation of Ag Clusters for Tailoring of Nano-Structures on Silicon Surface

Probe Induced Manipulation of Bromine, Iodine, and Sulfur on Si (100)

Two Mechanisms of Nanostructure Growth for STM Assisted CVD¹

Nano Scale Selective Al Growth on the Si(001)-H Surface using Dimethylethyamine Hydride

Modifications of Thioaromatic Monolayers by Low Energy Electrons

Selective Etching of the SiO₂/Si Surface with Low Energy Electron Stimulated Reaction by using STM

Current-Induced Local Oxidation: Mechanism, Quantum-Size Effects, and Applications

Semiconductor Applications of a Quadrupole Mass Spectrometer

In Situ Monitoring of Semiconductor Reactive Gas Processes using Partial Pressure Analyzers

Emission Free Measurement of Residual Gas in XHV Using Ionization by Trapped Electrons in Magnetic Field

Residual Gas Analyzer Ion Current Measurement, Calibration and Partial Pressure Detection Limits

Practical Quadrupole Theory: RGA Characteristics

Residual Gas Analyzer Performance Characteristics

Calibration of Gas-Analytic Mass Spectrometers for Gases and Vapors

In Situ Surface Diagnostics in Plasma Processing: Present Status and Future Challenges

Comparison of Surface Wave Plasma with ICP used in Oxide Etching

An ICP Source Design with Improved Azimuthal Symmetry¹

Characterization of 100 MHz Inductively Coupled Plasma (ICP) by Comparison with 13.56 MHz ICP

Multi-Frequency Operation of RIE and ICP Sources¹

Diagnostics in a Novel Capacitively Shielded, Inductively Coupled Plasma Source

Volume/Surface Effects on Dissociation Processes in Ar/C₄F₈ Plasma

Investigation of the Gasphase of Expanding Ar/C_xH_y Plasmas

Electrical Control of Spatial Uniformity of Chamber-Cleaning Plasmas Investigated using Planar Laser-Induced Fluorescence

Selected Energy Epitaxial Deposition of GaN and AlN on SiC(0001) Using Seeded Supersonic Free-Jets of NH₃ in Helium

Homoepitaxial Growth of GaN Using Seeded Supersonic Molecular Beams

The Effect of Scaling Precursor Duty Cycles on Pulsed Supersonic Molecular Beam AlN Growth Rates

In-Situ Surface Cleaning of GaN Using Hyperthermal Molecular Beams

Controlling Thin Film Morphology and Selectivity using Collimated Monoenergetic Molecular Beams

Three Dimensional Modeling of Silicon Deposition Process Scale-up Employing Supersonic Jets

A Novel Real-time Technique for Monitoring Adatom Surface Diffusion and Island Nucleation

Direct Measurement of Adsorbed Si Dimer Dynamics on Si(001)

Ion-Induced Surface Diffusion of Ge on Si(111)

Schwoebel Barriers on Stepped Pt(111)¹

Diffusion and Island Formation of Water Molecules on Ice Ih Surfaces

H and O promoted Self-Diffusion of Pt(110)

Adsorption of N on Fe(100): Diffusion and Adatom-Adatom Interactions Studied with Scanning Tunneling Microscopy

Novel Diffusion Channel Parallel to Steps: CO on Pt(111)

Potassium Surface Diffusion by Optical Techniques

Structural and Pt Adsorption Properties of Ultrathin Al₂O₃(001) Films on Al(111), Mo(110), and Ru(001)¹

Interaction and Growth of Rh on Hydroxylated Alumina Model Substrates

Growth of Ultrathin ß-MnO₂ on TiO₂(110) by Oxygen-Plasma-Assisted Molecular Beam Epitaxy

Ordered Cerium Oxide Thin Films Grown on Ru(0001) and Ni(111)¹

Evolution of Surface Morphology and Growth Modes for Epitaxial alpha-Fe₂O₃ on alpha-Al₂O₃

The Nature, Growth and Stability of Vanadium Oxides on Pd(111)

Photoemission Study of Ultra-thin NiO(111) Films Grown on Au(111)

The Effects of High Temperature Annealing on the Surface Reconstruction of NiO(111)

Morphology of MgO (111) Surfaces: Artifacts Associated with the Faceting of Polar Oxide Surfaces into Neutral Surfaces

Surface Phonons and Surface Phase Transitions in KTaO₃ (001)

Ex-situ Characterization of Polycrystalline Thin Films

TEM Study of Defects, Domains and Vacancy Ordering in Ga₂Se₃/GaAs(100) and Ga₂Se₃/Si(111) Thin Films

Sputtered Deposition of Ni₃Al Thin Films

Roughness Measurements With X-Rays Using an Out-Of-Plane Scattering Geometry

Accurate Thin Film Density Measured by Energy-Dispersive X-ray Reflectivity

Structure and Electronic Properties of the Novel Semiconductor Alloy Cd_1-xCu_xTe

Thickness-Dependence of Infrared Reflection-Absorption Spectra from Thin Film of Anatase-type TiO₂ Grown on Polished MgO(001) Substrate by Ar-ion Beam Sputtering

Rutherford Backscattering and Channeling Studies of Al and Mg Diffusion in Iron Oxide Thin Films

Advances in the Characterization of Thin (<30 nm) TiN Films Using SIMS