AVS1997 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, October 22, 1997
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-WeM
An In Situ IR+visible Sum Frequency Spectroscopic Study: Polymer Surface Structure and Composition Changes in Response to an Aqueous Environment
Surface Composition and Morphology of Polyimidesiloxane Copolymers with Short Polydimethylsiloxane Segments Studied by ESCA and TOF-SIMS
The Role of Surface Chemistry on the Intercoat Adhesion Performance of Polyester/Melamine - Epoxy Paint Systems
Quantitative Uses of the Valence Band Region in the Analysis of Polymer Blends
Trifluoroethanol Derivatization of Acrylic Acid-Methacrylic Acid Copolymers
Polymer Surface Chemistry: How Characterization Drives Synthesis and Structure Property Development
Secondary Ion Emission from Polymer Surfaces under Ar+, Xe+ and SF5+ Bombardment
Plasma-Phase Reactions and Plasma Polymer Product
Polymeric Surface Modification by Vacuum Ultraviolet Radiation From Low Pressure Plasmas
BI-WeM
Nanopattern Transfer Using Protein Crystal Masks: A Numerical Simulation of Experimental Results
Reactions of Cells to Nanotopography
Fabrication and Analysis of Patterned Neuronal Networks
Central Nervous System Cell Attachment on Chemically and Topographically Patterned Surfaces
Modulation of Aminal Cells on Potential Controlled Electrode.
Electrical Recordings from Electrogenic Cells using a Field-Effect Transistor Array.
Diffractive Cell Detection using a Microcontact Printed Antibody Grating
Cell-Based Sensor Microelectrode Array Characterized by XPS, SEM, and Impedance Spectroscopy.
EM+
Electronic and Chemical Structure of Conjugated Polymer Surfaces and Interfaces: Applications in Polymer-based Light Emitting Devices
Organic LED Devices Studied with Ion Scattering: Conductivity, Efficiencies and Degradation at Metal/Organic Interfaces
Degradation Processes in Polymeric Electroluminescent Devices
Photoluminesence Quenching of Alq3 by Metal Deposition: A Surface Analytical Investigation*
Energetics of Multilayer Organic Light Emitting Diodes by UV-Photoelectron Spectroscopy and Electrochemical Measurements
Energy Offsets of Molecular Levels at Organic Heterojunctions
Saturated Orange and Red Organic Light Emitting Diodes
Electronic Structure Changes in α-sexithiophene upon Exposure to Oxidizing and Reducing Gases
Controlled Formation of Organic Monolayers on Si(001)
Ultrathin Films of Perylenedianhydride Dyes on (001) Alkali Halide Surfaces: Characterization by Luminescence, FT-IR, Fluoresence Anisotropy and AFM
EM+
HREELS Studies of Passivation of Ge(100) using Highly Reactive Nitridation and Oxidation Agents.
Adsorption and Decomposition of H2S on the Ge(100) Surface.
TPD and HREELS Studies of the Interaction of Water with GaAs(001)-(4x2) Surface*
Chemistry of Hydrogen-Terminated Silicon Surfaces with Halogens
Reaction of Chlorine with In- and As-terminated InAs(100)
Transitional Phases on the GaAs(001) Surface
Hydrogen Adsorption on GaAs (001) Reconstructions
Highly Stable Si-Atomic Lines Formation and ß-SiC(100) Surface Reconstructions Studied by Room and High Temperature Scanning Tunneling Microscopy
New Atomic Structure for a Monolayer of Sb on Si(111)
Surface Chemistry Study of Atomic Layer Epitaxy for II-VI Semiconductor Growth
Surface Interactions and Energetics of SiH Radicals During Plasma Depsosition of Silicon-Based Materials
MI-WeM
Development of the Second-Harmonic Magneto-Optic Kerr Effect as an Interfacial Magnetometry Tool
Surface Magnetization Dynamics in NiFe Thin Films
Wide-Field Kerr Characterization of Magnetic Tunnel Junctions
X-ray Magnetic Circular Dichroism Imaging of Domains Caused by Anomalous Uniaxial Anisotropy in Co/Cu(001)
Magnetic Force and Dissipation Microscopy
Mapping Local Susceptibility using a Scanning Co-axial Write/Read Head.
Quantitative Analysis of Data Tracks in Magnetic Recording Media by Magnetic Force Microscopy.
Micromagnetic Behavior in GMR Multilayers Devices
Anisotropy Design in Magnetic Media: A Micromagnetics Study
MM+
MEMS Packaging - What have We Learned?
Flip Chip System Integration for MEMS
Instrumentation and Packaging of a Commercial Pressure Sensor for High-g Impact and Martian Environment
Electrostatic Self-Assembly Aided by Ultrasonic Vibration
Reliability Testing for MEMS Devices
Dynamic Analysis of a Parametrically Actuated MicroElectroMechanical System.
Thermal Property Measurements for Novel ICs and MEMS
A SiC/Release Layer/SiC/Si Platform for the Formation of Thermally Isolated MEMS Devices
MS+
Computational Modeling as a Design Tool in Microelectronics Manufacturing
A Self-Consistent Kinetic (Plasma-DSMC) Model for Chemically Reacting Low Pressure Plasma Reactors
Three-Dimensional Fluid Simulation of Inductively Coupled Plasma Reactors
Two and Three Dimensional Modeling of SiO2 Chemical Mechanical Planarization Based on Pad Deformation
A Physically based Analytic Collimated PVD Model for Control and Prediction.
Composition Control by Current Modulation in DC-Reactive Sputtering
Topography Simulation for Redeposition Effects on Etch Pattern Resolution of Platinum Cell Capacitor Electrodes of DRAM in Ar/Cl2/O2 Sputter Etching
Effects of Wall Conditioning on Ion and Neutral Densities and Etching Rate in High Density Plasma Reactors Using BCl3/Cl2/Ar Gas Mixtures*
Investigation of the Cl2/BCl3/Ar Chemical Mechanisms and the Effects on Ion and Neutral Densities and Etching Rate in High Density Plasma Reactors*
Trends in Wafer-Edge Aluminum Etch Rate Uniformity in a Commercial ICP Plasma Etch System
NS-WeM
Low-Temperature Near-Field Scanning Optical Microscopy Study of III-V Quantum Heterostructures.
Near-Field Optics at Optic Fiber End-Faces
Optical Writing and Reading on Phase-Change Thin Film using an Internal Reflection Mode Scanning Near-Field Optical Microscope
Near-Field Optical Microscopy Studies of Gold Nanoparticles
Semiconductor Nanocrystallites: From Artificial Atoms to Quantum Dot Heterostructures
Zinc Nanocrystals Embedded in Fused Silica: Radiation Effects of 266 nm Picosecond Light Pulses
The Origin of Photon Absorption above Surface Plasmon Resonance of Gold Colloids Formed in Silica via Ion Implantation
Multilayered Films of Nanoparticles in a Single Step through Amphiphilic Templating
Rigorous Nanometric Dipole-Surface Formalism and its Application to Molecule Fluorescence
Experimental Study of Two Surface Plasmon Interference: Some Spectroscopic Aspects
PS1-WeM
Plasma Chemistry Mechanisms for High-Density-Plasma Aluminum Etching
Effect of CHF3 Addition On Cl2/BCl3 Chemistry Based Stacked TiN/AlCu/Ti/TiN Metal Etching
Simple Method for Measuring Etching Rate Constants, Etchant Production and Predicting Uniformity
Etching of Photoresist through Polymer Layer, Resist Selectivity and Resist Faceting in Oxide Etch
A Spatially-averaged Model for Plasma Etch Processes: Comparison of Different Approaches to Electron Kinetics.
Investigation of Plasma Uniformity for Various Feedstock Gases in an Inductively-Coupled Plasma Source
Measurement of Neutral Kinetic Energies and Source Gas Cracking in Ar, N2, and Cl2 Electron Cyclotron Resonance Plasmas
Atomic-Scale Mechanisms of Halogen Etching of Cu Surfaces
The Effects of Plasma Processing Parameters on the Surface Reactivity of OH(X2Π) in Tetraethoxysilane/O2 Plasmas During Deposition of SiO2
Modeling of Silicon Dioxide Deposition in High Density Plasma Reactors and Comparisons of Model Predictions with Experimental Measurements
PS2-WeM
SiO2 Etching in Magnetic Neutral Loop Discharge (NLD) Plasma
Magnetic Field Optimization in a Dielectric M.E.R.I.E. Reactor to Produce an Instantaneously Uniform Plasma and Development of a Diagnostic to Measure the Plasma Uniformity for High Cathode Powers
X-ray Photoelectron Spectroscopy Analyses of High Aspect Ratio SiO2 Contact Holes Processed in Industrial Plasma Etching Systems
Effects of the Gas Inlet Position on the Plasma Chemistry and the SiO2 Etching Characteristics in a Helicon Plasma Etcher
Dielectric Etching for 0.18µm Technologies: Comparison between MRIE and HDP Sources
Effect of H2 Addition on Surface Reactions During CF4/H2 Plasma Etching of Silicon and Silicon Dioxide Films
Analysis of Surface Polymers in Selective Oxide Etching
Radical Composition of High-Density Fluorocarbon Plasmas and the Correlation with Oxide Etch Selectivity
Oxide Etching in Fluorocarbon Plasmas: Surface Chemistry and ICP Reactor Simulation
Application of a Rapid Two Dimensional Plasma Model to sub-0.25 µ Process Development
Effect of Hydrogen in High Aspect Ratio, Small Feature Dielectric Etch
SS-WeM
Interaction of Gas-Phase D Atom with O2 Chemisorbed on Pt(111): O2 Desorption and D2O Formation at 85 K
Reaction of Gas-Phase Atomic Oxygen with Preadsorbed Deuterium on Ru(001)
Dynamical Simulations of the Molecular Adsorption of Alkanes on Platinum Single Crystal Surfaces
Kinetics and Dynamics of O2 Displacement from Pt(111) by Incident CO Molecules
CO Oxidation on Pt(111) at 85 K Triggered by Gas-Phase D Atoms
Ammonia Decomposition Induced by Gas-Phase Atomic Hydrogen on Ru(001)
Investigation of the Effects of Low-Energy Electron Bombardment on Coadsorbed Layers of Hydrogen and Ammonia on Pt(111)
Theory of Current-induced Bond Breaking by the STM: O2/Pt(111)
Low Energy Dynamics for Mixtures of S and CO on Cu(111)
SS1-WeM
Welch Award Invited Talk
Atomic and Electronic Structures of Ge(111)-c(2x8) Surface with Defects Studied by STM
Scanning Tunneling Microscopy (STM) and Low Energy Electron Diffraction (LEED) Study of Para- and Meta-Xylene and Its Coadsorption with Carbon Monoxide on Rh(111)
Cross-Sectional Scanning Tunneling Microscopy at Low Bias
Scanning Tunneling Microscopy of Wurtzite II-VI Semiconductor Cleavage Surfaces
Adsorption and Incorporation of Potassium at the Pt(111) Surface
The Structure of Buried Atoms in the High Coverage S/Cu(001) System by Chemical-State Photoelectron Diffraction
The Local Adsorption Structure of SO2 on Ni(111): A Normal Incidence X-ray Standing Wavefield Determination
Location of Light atoms by X-ray Standing Waves: Structure of the O/Na/Si(111) Interface
TF-WeM
Microstructure and Surface Morphology Studies of Si1-xCx on Si by Atomic Force Microscope
The Effect of Adsorbed Atomic Hydrogen on the Growth of the Si/Ge(100) Interface Studied by Positron-Annihilation-Induced Auger Electron Spectroscopy (PAES)
A Roadmap Runs Through It - Research in Copper Thin Films for Silicon Technology
Ultra-high Doping during Si(001) Gas-Source Molecular Beam Epitaxy: Growth kinetics, B-Incorporation, Strain, and Electrical Activation
Growth of Si1-xGex on Si(011)16x2 by Gas Source Molecular Beam Epitaxy
Growth Induced InAs Quantum Dot Columns
Microstructure Evolution of GaSe Thin Film Grown on GaAs(100) by van der Waals Epitaxy
The Effects of CdCl2 Treatment on the Recrystallization and Electro-Optical Properties of CdTe Thin Films
Effects of Hydrogen on the Material Properties of r.f.-Sputtered ZnTe:Cu Thin-Films
VT-WeM
Calculated Adsorption Isotherms of Hydrogen for Technical Surfaces at Various Temperatures1
Experimental Test of the Propagation of a He Pressure Front in a Long, Cryogenically Cooled Tube
Measurements of the Helium Propagation in a 480 m Long Vacuum Tube Cooled at 4.2 K
Performance of the RHIC First Sextant Vacuum Systems
Preliminary Design of the NIF Target Area Vacuum Systems
Low-Gas-flow Measurements; Examining Measurement Errors and Their Causes.
Acoustic Flowmeter for the Accurate Metering of Gases for Semiconductor Processing.
Turbomolecular Pump Design for High Pressure Operation.
A History of the Vacuum Tube Industry
Sessions | Time Periods | Topics | Schedule Overview