AVS1997 Thursday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Thursday, October 23, 1997
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-ThM
A Study of the Epitaxial Growth of SrTiO3 on SrTiO3(001) using a Novel Oblique-Incidence Reflectance Difference Technique.
Application of Ellipsometry in Studying the Reactions of Li with Small Molecules in UHV
Ellipsomicrosopy for Surface Imaging - A Novel Tool to Investigate Surface Dynamics
Optical Determination of Free Carrier Profiles in Silicon using IR Ellipsometry
Auger Spectroscopy in Semiconductor Defect Review: Applications and Artifacts
Applications of a 200mm Wafer-Capable AES Defect Review Tool
Imaging of Doped Silicon Using High Energy Resolution Auger Electron Spectroscopy
2D Imaging of Surface Morphology by Energy-analyzed Secondary Electrons and Auger Electron Spectroscopy for Stepped Si(111) Surfaces
SIMS Technique for SiGe/Si and SiGeC/Si Heterojunctions and Superlattices
A Plasma-Polymerized Protective Film for TEM Specimen Preparation by FIB Etching
EM-ThM
Atomic-Layer Growth of Si on Ge(100) Using SiH4
Effects of H Coverage on Ge Segregation during Si1-xGex Gas-Source Molecular Beam Epitaxy
SiGe Materials and Devices
Surface Morphological Evolution in Si0.7Ge0.3/Si(001) Structures Grown by Gas Source-Molecular Beam Epitaxy
Formation of a SiGe/Si Heterojunction Diode by Ultrahigh Vacuum Electron Cyclotron Resonance Chemical Vapor Deposition
High-Performance SiGe/Si Heterostructures Produced by Double-Energy Si+ and Ge+, and Ge+ and Ge2+ Ion Implantations
Atomic-Layer Etching Control of Si and Ge Using an Ultraclean ECR Plasma
Low Temperature Selective Heteroepitaxy of Heavily Doped Si1-xGex on Si for Application to Ultrasmall Devices
Si/Si1-x-yGexCy Heterostructures - Fundamental Properties and Devices
MI+
Approaches to Hard Disk Media Storage Density Improvements
Advanced Magnetoresistive (MR) Heads
Spin Valves: Exploration of Magnetotransport in Layered Films Leads to a Better Recording Head
Meeting the Process Challenges for Spin-Valve Fabrication on an Industrial Scale
Optimization of NiO/X (X=Co, NiFe and CoFe) Exchange Bilayers for Spin-valve Sensors
Study of High Temperature Effect on Spin-Valve Sensor Transfer Curves.
NS-ThM
Moving Molecules with the STM
"Resonant Conducting" in Nano-Pattering Hydrogen-Passivated Si(100) Surfaces by Atomic Force Microscopy
Electric Field and Emission Current Induced Surface Modification of Au in the Interfacial Force Microscope
Optimization of Self-Assembled Organosilane Films on Modified Si(100) Surfaces for Nanolithography Applications
AFM Data Storage Using a Rotating Disk: Tracking and Wear
Nanolithography by Manipulation of Catalytic Metal Clusters using an Atomic Force Microscope
Novel Non-Contact AFM Based Approaches for the Direct Manipulation of Nanoscale 3D Objects on Surfaces
Ti/TiOx/Ti Single Electron Tunnel Junctions Fabricated using Si-based Inorganic Electron Beam Resist.
Nanoprecision Lithography
Electron Scattering in Lithography and Transmission through Thin Films
Arrays of Submicron Metal Rings Fabricated using NCG Replica Masks
PS+
The Application of I-PVD to Very High Aspect Ratios: Limits and Opportunities
Plasma Physics of Ionized Physical Vapor Deposition
High Aspect Ratio Deposition of Copper and Aluminum in an ECR Ionized PVD Reactor
Comparison of Modeling and Experimental Results for Copper and Aluminum Deposition in an ECR Ionized PVD Reactor
Modeling Ionized Metal Physical Vapor Deposition In Inductively Coupled Plasma Tools
An Investigation of an Ar/Cu Plasma for Ionized Sputtering*
Investigation of Ionized PVD With Various Plasma Sources
Ionized PVD Deposition of Ti and TiN Liners
Properties of TiN Films Deposited by Ion Metal Plasma (IMP)
Film Properties of Ti/TiN Bilayers Deposited Sequentially by Ionized Physical Vapor Deposition
PS1-ThM
Beam Studies of Halogen Atom Homonuclear and Heteronuclear Surface Reactions
Measurement of the Reactivity of CF2 in Saturated Fluorcarbon Plasmas using Imaging of Radicals Interacting with Surfaces
A Meso-scale Model for Bulk Plasma and Surface Chemistry in Cl2 Etching of poly-Si1
Characterization of Si(100) Surfaces after High Density Plasma HBr/Cl2/O2 Etching by AFM and XPS
Gas Phase and Surface Diagnostics for Understanding the Etching and Polymer Deposition Mechanisms on Si Surface
X-ray Photoelectron Spectroscopy Analyses of Metal Stacks Etched in Cl2/BCl3 and Cl2/HCl/N2 Chemistries : Investigation of Sidewall Passivation Mechanisms and Anti-Corrosion Treatments Efficiency
Etching of Thin Films in High Density Fluorocarbon Plasmas: Mechanism of Etching through a Steady State Fluorocarbon Layer
Resist Etching Mechanisms in Fluorocarbon High-Density Plasmas
Laser Thermal Desorption Analysis of Surface Adlayers during Inductively-Coupled Plasma Etching of Semiconductors
Halogen Uptake by Thin SiO2 Layers on Exposure to HBr/O2 and Cl2 Plasmas, Investigated by Vacuum Transfer XPS
SS1-ThM
Direct Observation of C2N2 Uptake and Dissociation on Pd(110) by Fast High Resolution XPS
Carbon Monoxide Adsorption and Oxidation on Ir(110)
Non-uniform Reaction Rates in Surface Chemical Reactions Studied by STM
The NO-H2 Reaction over Rh Surfaces with (111) Terraces and Differing (100) Step Densities: XPS Measurements using Synchrotron Radiation.
Probing the Role of Oxygen Coordination in Hydrocarbon Oxidation: Reactions of Methyl Radicals and Alcohols on Oxygen Covered Mo(110)
Particle Size Dependent CO Dissociation on Alumina Supported Rh: A Model Study
Chemisorption of Br2 onto As-rich GaAs(100)
Nanometer Scale Selective Oxygen Etching of Si(111) Surface Using Silicon Nitride Islands
Simulation of Diamond Film Growth in Premixed Low-Pressure Acetylene-Oxygen Flames
SS2-ThM
Surface Relaxation on the Clean and Hydrogen Covered Ru(0001) Surface Determined by X-ray Diffraction
Crystallographic Steps and Chemical Adsorption: Fundamental Measurements of H/Vicinal Al(111)
C60 Adsorption on Clean and Au Covered Ni(110): Evidence for Interfacial Restructuring and One Dimensional Molecular Nanoscale Templating
Reconstruction of the W(211) Surface As Induced by Ultrathin Films of Rh, Pt and Pd
Equilibrium Crystal Shapes in Three and Two Dimensions
High-Temperature STM of the Phase Transitions of Au(110) and Pt(110)
Structure of the Ga-rich GaAs(001) (3x2) Reconstruction
High-Temperature Evolution of the Si(111) Surface Studied via Synchrotron Radiation
The Solid-Liquid Phase Transition in a Two Dimensional Lattices of Flexible Rod Shaped Molecules
Structure and Dynamics of Monolayer Films of KCN Vapor-Deposited onto KBr(001)
TF1-ThM
Computer Modeling as a Tool to Predict Deposition Rate and Film Composition in the Reactive Sputtering Process
Ion Beam Sputter Deposition on Large Area Substrates - Comparison of Modeling and Experiment
High Rate Deposition of Stoichiometric Al2O3 using Non-arcing dc Magnetron Sputtering.
Formation of Ohmic Contacts to III-V Compound Semiconductors
Simulation of Metal Multilayer Deposition
Atomistic Modelling for Simulating Physical Vapor Deposition
Vapor Transport during Directed Vapor Deposition
Modeling of Hyperthermal Molecular Beam Film Deposition
Simulations of Thin Film Deposition Via Hyperthermal Cluster Impacts
TF2-ThM
UV Raman Scattering Studies of Tetrahedral Amorphous Carbon.
Crystalline Orientation and Structure of WS2 Thin Films by MOCVD
Deposition and Characterization of Amorphous Diamond Films on Mo Tips.
Mechanical, Optical and Structural Properties of MgF2 and TiO2 Thin Films and their Multilayers Deposited by Plasma Ion Assisted Deposition
Multi-Technique Characterization of WSix Films
Investigation of Borophosphosilicate Glass Defects with the Atomic Force Microscope
Atomic Force Microscopy Studies of Substrate-Dependent Nucleation and Selective Deposition of PECVD Silicon
STM of GaAs Heteroepitaxy on Ge(001)
Comparison of Mass Spectroscopy of Recoiled Ions (MSRI) with SIMS for Trace Analysis of Na, Al, Cu and Fe Contaminants on Si(100) and Ge(100) Surfaces
Fourier Deconvolution of the Spectral Components of Electromodulation Spectra
VM+
Microstructure in Epitaxial Aluminum Nitride Thin Films Grown on (0001) Aluminum Oxide
Influence of N2 and O2 on Aluminum Film Microstructure Development During Sputter Deposition and Annealing
Monolithic and Multilayer Cr/CrN, Cr/Cr2N and Cr2N/CrN Coatings on 52100 Steel
Process Controlled Microstructural and Binding Properties of PVD and CVD Films
From Microcrystalline to Nanocrystalline Diamond Thin Films Grown by H2/Ar/CH4 Microwave Plasmas
Thickness-Dependent Crystallinity of Sputter Deposited Titania
Development of Crystallography and Morphology of Sputter Deposited Vanadia on Smooth and Rough Surfaces
Material and Temperature Effects on Obliquely Deposited Film Microstructures
Synthesis of Electron Beam Thermal Barrier Coatings Using Directed Vapor Deposition
VT+
Microfluidic Devices for Semiconductor Processing
A Study of MEMS-Type Low Pressure Sensors
A Micromachined Metal Contaminant Detector for Monitoring Ion Propulsion Plume Re-Impingement
Microprobes for a New MEMS Wafer Probe Card
Electron Tunneling Noise in Surface Micromachined Tunneling Tip Devices.
Ciliary Microactuator Array for Scanning Electron Microscope Positioning Stage
A Micromachined Scanning Fabry-Perot Interferometer
Low Voltage, High Torque and Displacement Microactuators
Mechanical Testing of LIGA and SMM Micro-ElectroMechanical Systems Materials
Complete Integrated CMOS Controller for Tunnel Instruments
Sessions | Time Periods | Topics | Schedule Overview