AVS1997 Thursday Morning

A Study of the Epitaxial Growth of SrTiO₃ on SrTiO₃(001) using a Novel Oblique-Incidence Reflectance Difference Technique.

Application of Ellipsometry in Studying the Reactions of Li with Small Molecules in UHV

Ellipsomicrosopy for Surface Imaging - A Novel Tool to Investigate Surface Dynamics

Optical Determination of Free Carrier Profiles in Silicon using IR Ellipsometry

Auger Spectroscopy in Semiconductor Defect Review: Applications and Artifacts

Applications of a 200mm Wafer-Capable AES Defect Review Tool

Imaging of Doped Silicon Using High Energy Resolution Auger Electron Spectroscopy

2D Imaging of Surface Morphology by Energy-analyzed Secondary Electrons and Auger Electron Spectroscopy for Stepped Si(111) Surfaces

SIMS Technique for SiGe/Si and SiGeC/Si Heterojunctions and Superlattices

A Plasma-Polymerized Protective Film for TEM Specimen Preparation by FIB Etching

Atomic-Layer Growth of Si on Ge(100) Using SiH₄

Effects of H Coverage on Ge Segregation during Si_1-xGe_x Gas-Source Molecular Beam Epitaxy

SiGe Materials and Devices

Surface Morphological Evolution in Si_0.7Ge_0.3/Si(001) Structures Grown by Gas Source-Molecular Beam Epitaxy

Formation of a SiGe/Si Heterojunction Diode by Ultrahigh Vacuum Electron Cyclotron Resonance Chemical Vapor Deposition

High-Performance SiGe/Si Heterostructures Produced by Double-Energy Si⁺ and Ge⁺, and Ge⁺ and Ge²⁺ Ion Implantations

Atomic-Layer Etching Control of Si and Ge Using an Ultraclean ECR Plasma

Low Temperature Selective Heteroepitaxy of Heavily Doped Si_1-xGe_x on Si for Application to Ultrasmall Devices

Si/Si_1-x-yGe_xC_y Heterostructures - Fundamental Properties and Devices

Approaches to Hard Disk Media Storage Density Improvements

Advanced Magnetoresistive (MR) Heads

Spin Valves: Exploration of Magnetotransport in Layered Films Leads to a Better Recording Head

Meeting the Process Challenges for Spin-Valve Fabrication on an Industrial Scale

Optimization of NiO/X (X=Co, NiFe and CoFe) Exchange Bilayers for Spin-valve Sensors

Study of High Temperature Effect on Spin-Valve Sensor Transfer Curves.

Moving Molecules with the STM

"Resonant Conducting" in Nano-Pattering Hydrogen-Passivated Si(100) Surfaces by Atomic Force Microscopy

Electric Field and Emission Current Induced Surface Modification of Au in the Interfacial Force Microscope

Optimization of Self-Assembled Organosilane Films on Modified Si(100) Surfaces for Nanolithography Applications

AFM Data Storage Using a Rotating Disk: Tracking and Wear

Nanolithography by Manipulation of Catalytic Metal Clusters using an Atomic Force Microscope

Novel Non-Contact AFM Based Approaches for the Direct Manipulation of Nanoscale 3D Objects on Surfaces

Ti/TiO_x/Ti Single Electron Tunnel Junctions Fabricated using Si-based Inorganic Electron Beam Resist.

Nanoprecision Lithography

Electron Scattering in Lithography and Transmission through Thin Films

Arrays of Submicron Metal Rings Fabricated using NCG Replica Masks

The Application of I-PVD to Very High Aspect Ratios: Limits and Opportunities

Plasma Physics of Ionized Physical Vapor Deposition

High Aspect Ratio Deposition of Copper and Aluminum in an ECR Ionized PVD Reactor

Comparison of Modeling and Experimental Results for Copper and Aluminum Deposition in an ECR Ionized PVD Reactor

Modeling Ionized Metal Physical Vapor Deposition In Inductively Coupled Plasma Tools

An Investigation of an Ar/Cu Plasma for Ionized Sputtering*

Investigation of Ionized PVD With Various Plasma Sources

Ionized PVD Deposition of Ti and TiN Liners

Properties of TiN Films Deposited by Ion Metal Plasma (IMP)

Film Properties of Ti/TiN Bilayers Deposited Sequentially by Ionized Physical Vapor Deposition

Beam Studies of Halogen Atom Homonuclear and Heteronuclear Surface Reactions

Measurement of the Reactivity of CF₂ in Saturated Fluorcarbon Plasmas using Imaging of Radicals Interacting with Surfaces

A Meso-scale Model for Bulk Plasma and Surface Chemistry in Cl₂ Etching of poly-Si¹

Characterization of Si(100) Surfaces after High Density Plasma HBr/Cl₂/O₂ Etching by AFM and XPS

Gas Phase and Surface Diagnostics for Understanding the Etching and Polymer Deposition Mechanisms on Si Surface

X-ray Photoelectron Spectroscopy Analyses of Metal Stacks Etched in Cl₂/BCl₃ and Cl₂/HCl/N₂ Chemistries : Investigation of Sidewall Passivation Mechanisms and Anti-Corrosion Treatments Efficiency

Etching of Thin Films in High Density Fluorocarbon Plasmas: Mechanism of Etching through a Steady State Fluorocarbon Layer

Resist Etching Mechanisms in Fluorocarbon High-Density Plasmas

Laser Thermal Desorption Analysis of Surface Adlayers during Inductively-Coupled Plasma Etching of Semiconductors

Halogen Uptake by Thin SiO₂ Layers on Exposure to HBr/O₂ and Cl₂ Plasmas, Investigated by Vacuum Transfer XPS

Direct Observation of C₂N₂ Uptake and Dissociation on Pd(110) by Fast High Resolution XPS

Carbon Monoxide Adsorption and Oxidation on Ir(110)

Non-uniform Reaction Rates in Surface Chemical Reactions Studied by STM

The NO-H₂ Reaction over Rh Surfaces with (111) Terraces and Differing (100) Step Densities: XPS Measurements using Synchrotron Radiation.

Probing the Role of Oxygen Coordination in Hydrocarbon Oxidation: Reactions of Methyl Radicals and Alcohols on Oxygen Covered Mo(110)

Particle Size Dependent CO Dissociation on Alumina Supported Rh: A Model Study

Chemisorption of Br₂ onto As-rich GaAs(100)

Nanometer Scale Selective Oxygen Etching of Si(111) Surface Using Silicon Nitride Islands

Simulation of Diamond Film Growth in Premixed Low-Pressure Acetylene-Oxygen Flames

Surface Relaxation on the Clean and Hydrogen Covered Ru(0001) Surface Determined by X-ray Diffraction

Crystallographic Steps and Chemical Adsorption: Fundamental Measurements of H/Vicinal Al(111)

C₆₀ Adsorption on Clean and Au Covered Ni(110): Evidence for Interfacial Restructuring and One Dimensional Molecular Nanoscale Templating

Reconstruction of the W(211) Surface As Induced by Ultrathin Films of Rh, Pt and Pd

Equilibrium Crystal Shapes in Three and Two Dimensions

High-Temperature STM of the Phase Transitions of Au(110) and Pt(110)

Structure of the Ga-rich GaAs(001) (3x2) Reconstruction

High-Temperature Evolution of the Si(111) Surface Studied via Synchrotron Radiation

The Solid-Liquid Phase Transition in a Two Dimensional Lattices of Flexible Rod Shaped Molecules

Structure and Dynamics of Monolayer Films of KCN Vapor-Deposited onto KBr(001)

Computer Modeling as a Tool to Predict Deposition Rate and Film Composition in the Reactive Sputtering Process

Ion Beam Sputter Deposition on Large Area Substrates - Comparison of Modeling and Experiment

High Rate Deposition of Stoichiometric Al₂O₃ using Non-arcing dc Magnetron Sputtering.

Formation of Ohmic Contacts to III-V Compound Semiconductors

Simulation of Metal Multilayer Deposition

Atomistic Modelling for Simulating Physical Vapor Deposition

Vapor Transport during Directed Vapor Deposition

Modeling of Hyperthermal Molecular Beam Film Deposition

Simulations of Thin Film Deposition Via Hyperthermal Cluster Impacts

UV Raman Scattering Studies of Tetrahedral Amorphous Carbon.

Crystalline Orientation and Structure of WS₂ Thin Films by MOCVD

Deposition and Characterization of Amorphous Diamond Films on Mo Tips.

Mechanical, Optical and Structural Properties of MgF₂ and TiO₂ Thin Films and their Multilayers Deposited by Plasma Ion Assisted Deposition

Multi-Technique Characterization of WSix Films

Investigation of Borophosphosilicate Glass Defects with the Atomic Force Microscope

Atomic Force Microscopy Studies of Substrate-Dependent Nucleation and Selective Deposition of PECVD Silicon

STM of GaAs Heteroepitaxy on Ge(001)

Comparison of Mass Spectroscopy of Recoiled Ions (MSRI) with SIMS for Trace Analysis of Na, Al, Cu and Fe Contaminants on Si(100) and Ge(100) Surfaces

Fourier Deconvolution of the Spectral Components of Electromodulation Spectra

Microstructure in Epitaxial Aluminum Nitride Thin Films Grown on (0001) Aluminum Oxide

Influence of N₂ and O₂ on Aluminum Film Microstructure Development During Sputter Deposition and Annealing

Monolithic and Multilayer Cr/CrN, Cr/Cr₂N and Cr₂N/CrN Coatings on 52100 Steel

Process Controlled Microstructural and Binding Properties of PVD and CVD Films

From Microcrystalline to Nanocrystalline Diamond Thin Films Grown by H₂/Ar/CH₄ Microwave Plasmas

Thickness-Dependent Crystallinity of Sputter Deposited Titania

Development of Crystallography and Morphology of Sputter Deposited Vanadia on Smooth and Rough Surfaces

Material and Temperature Effects on Obliquely Deposited Film Microstructures

Synthesis of Electron Beam Thermal Barrier Coatings Using Directed Vapor Deposition

Microfluidic Devices for Semiconductor Processing

A Study of MEMS-Type Low Pressure Sensors

A Micromachined Metal Contaminant Detector for Monitoring Ion Propulsion Plume Re-Impingement

Microprobes for a New MEMS Wafer Probe Card

Electron Tunneling Noise in Surface Micromachined Tunneling Tip Devices.

Ciliary Microactuator Array for Scanning Electron Microscope Positioning Stage

A Micromachined Scanning Fabry-Perot Interferometer

Low Voltage, High Torque and Displacement Microactuators

Mechanical Testing of LIGA and SMM Micro-ElectroMechanical Systems Materials

Complete Integrated CMOS Controller for Tunnel Instruments