AVS1997 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, October 20, 1997
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-MoM
Variable Temperature AFM on Electrically Insulating Surfaces
Si-Based Heterolayer and Device Structures Observed by Cross-Sectional STM
Effects of Crosslinking on the Spreading of 150 nm Polymer Particles
High Pressure Adsorbate Structures Studied by Scanning Tunneling Microscopy: CO on the Pt(111) Surface
Evaluation of Phase Separation in PVC/PMMA Blends using Photoelectron and Ion Imaging
Laboratory Size Micro-XPS System with a Laser-Plasma X-ray Source
The Application of a Spherical Mirror Analyser to High Resolution Imaging XPS
Understanding Bonding in Glass Fiber Materials Through a Comparison of Large and Small Area X-ray Photoelectron Images and Spectra
X-ray Spectro-microscopy; A New Technique for Materials Science
EM-MoM
New Trends in Lightwave Communications
Novel Optoelectronic Devices using Wafer Bonding
III-V Technology, Materials and Processing for Photonic Integration
Fibers for the 21st Century: Materials Challenges
Optical Communication Technology Challenges for Polymeric Integrated Optic Waveguide Circuitry
Optical Demultiplexer Devices for Communication Systems using Wavelength Division Multiplexing
EM+
Atomic Scale Processes During Oxidation at Si(001)-SiO2 Interfaces
Experimental and Theoretical Studies of the Initial Water-Induced Oxidation of Si(100)-2x1
Real-Time Core-Level Spectroscopy of Initial Thermal Oxide on Si(100)
High Resolution XPS Study of Ultrathin Oxynitride Films on Si(100).
Direct Observation of Si Lattice Strain and its Distribution in the Si(001)-SiO2 Interface Transition Layer with Medium Energy Ion Scattering Spectroscopy
Optimization of Si-SiO2 Interface Chemistry and Structure by Combined Plasma and Rapid Thermal Processing.
Processing Dependence of the Structure and Electrical Characteristics of the Si/SiO2 Transition Layer.
Si/SiO2 Interface Roughness: Comparison between Surface Second Harmonic Generation and X-ray Scattering
Measurements of Nitrided SiO2/Si Interface Roughness By Crystal Truncation Rod Profiling
Recent Improvements in Measuring Ultrathin Oxynitride Layers Using Secondary Ion Mass Spectrometry (SIMS)
MI-MoM
Oscillatory Exchange Coupling in Magnetic Multilayers.
Fe/Rh Multilayers: Magnetic and Structural Characterization
Magnetic Anisotropy and Atomic Structure of the Fe/GaAs Interface*
Structural and Magnetic Phases of Ultrathin Fe Wedges on Diamond (100)*
Exploring Step-Induced Magnetic Anisotropies in Ultrathin Films
Co on Stepped Cu(100) Surfaces: A Comparison of Experimental Data with Monte Carlo Growth and Micromagnetics Simulations.
Direct Observation of Interface Roughness Dependence of Interfacial Magnetism using Diffuse X-ray Resonant Magnetic Scattering
Correlating Changes in Magnetic Roughness with Variations in the Helicity Dependent Soft X-ray Resonant Diffuse Scattering
MS-MoM
Ultra Clean Society's Activities for Manufacturing Science and Technology
Real-Time Monitoring of Scattered Laser Light by a Single Particle of the Order of Several Tens Nanometers in the Etching Chamber in Correspondence with its Equipment Status
Pit-Free Electropolishing of Aluminum and its Application for Process Chamber
TEOS/O3 CVD to Employ a Clean and High Density Ozone Generator
Integrated Compact Gas Delivery System
Etching/Deposition Uniformity in Flat Parallel Electrode Plasma Systems Using Shower Head
Self-Consistent Particle Simulation of Radio-Frequency CF4 Discharge with Implementation of All Ion-Neutral Reactive Collisions
Suppression of Impurity-Backdiffusion in Vacuum Pumping Systems for Ultraclean Low-Pressure Semiconductor Processing
High Density Microwave Plasma Source without Magnetic Field for Large Area PECVD and Plasma Oxidation
Highly-Reliable Ultra Thin Gate Oxide Formation by Employing a New Water Vapor Generator
NS+
Molecular Aspects of Friction: Systematic Studies of the Frictional Properties of Selectively Fluorinated Self-Assembled Monolayers
Mechanical Properties of Alkylsilane Monolayers with Mixed-Chain-Length
Applications of Multi-task Scanning Probes to Friction and Adhesion
Nanofriction and Nanoimaging at the Insulator-Liquid Interface
Atomic-Scale and Nano-Scale Frictional Behavior of Clean and Hydrogen-Terminated Diamond(111) Surfaces
Quantized Friction and Atomic Lattice Resolution in AFM Imaging
Nanotribology of Single Crystal Metals
Friction at Sub-Micron Lengthscales
Growth and Tribological Properties of Thin Ice Films.
Scanning Force Microscope Observations of Corrosive Wear in Single Crystal Carbonates and Phosphates
PS-MoM
Plasma Charging in ULSI Fabrication
The Physics of Plasma-Induced Charging Damage
Plasma Measurements and Plasma Damage in a High-Density, Inductively Coupled Metal Etcher
Radiation Damage Effects in a High Density Plasma
Pattern Dependent Wafer Charging in an Inductively Coupled Metal Etch System
Reduction of Electron Shading Effect on Gate Etching using High Pressure HBr Gas Chemistry
Mechanisms Involved in Plasma Charging Induced Device Damage
Non-Contact Electrical Characterization of Plasma Damage
Observation of Channel Shortening in n-MOSFETs Arising from Interconnect Plasma Processing
PS+
Wafer Level Ion Energy Analyzer for Plasma Analysis
A Compact Floating Energy Analyzer for Measuring Energy Distributions of Ions Bombarding a rf Biased Electrode
Preliminary Empirical Results Suggesting the Mapping of Dynamic in situ Process Signals to Real Time Wafer Attributes in a Plasma Etch Process
Spectral Interferometry -- A Novel Process Control Diagnostic.
Plasma Sensors for Diagnostics and Control in Semiconductor Process Development and Manufacturing
A Deposition-Tolerant Ion Flux Probe for In-Situ Process Control
High-Density Plasma Diagnostics: Using Optical Emission Spectroscopy to Determine Electron Temperature, Plasma Density and Cl2 Percent Dissociation
RF Electrical Measurements as Sensors for Physical Properties of Plasmas
Real-Time Control and Modeling of Plasma Etching.
QS-MoM
Surface Composition and Topography of Compound Semiconductors after Sputtering.
Ion-Implanted Reference Materials for the Semiconductor Industry
Quantitative Analysis by Static SIMS: Exploiting All the Information in the Spectra
Surface Analysis Using Slow, Highly Charged Ions like Au69+
Contribution of SIMS Analysis to Characterization of GaN and Related Compounds
SS+
Orientation and Order in Microcontact-Printed, Self-Assembled Monolayers of Alkane Thiols on Gold, Investigated with NEXAFS
Ordered Thiophene, Methanethiol, and Benzeneselenol Monolayers on Au(111) formed by Gas- and Liquid-phase Deposition: New Insights into the Chemisorption Mechanism.
Nucleation and Growth Phenomena in Organic Amphiphile Monolayers
Forced Alignment of Adsorbed Organic Monolayers During STM Observation.
Molecular Monolayer Dynamics: Atomistic Potentials and Ensemble Responses
Simulation of Interfaces using Molecular Dynamics
Effect of the Environment on the Molecular Orientation of Thiol Monolayers Investigated by Second Harmonic Generation (SHG)
Self-Assembled Monolayers of n-alkane Thiols: Investigation of Chain Length Dependence by Nonlinear Optical Vibrational Spectroscopy
Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100) Surface
The Influence of Surface Modifiers on the Kinetics of Methanol Electrooxidation at Platinum Surfaces
SS1-MoM
Clean and Modified Oxide Surfaces: Structure and Reactivity
Metal Adsorption Calorimetry and Adhesion Energies on Clean Single-Crystal Oxide Surfaces
Oxygen Adsorption and Oxide Formation on Ni3Al(111)
The Growth and Characterization of Ag and Au Clusters on Al2O3/Re(0001)
Laser Desorption Mass Spectrometry and Vibrational Spectroscopy of Hydrocarbon Chemistry on Hydroxylated and Non-Hydroxylated Al2O3 Surfaces
Thermal and Electron-Stimulated Desorption of Na from Amorphous SiO2 Films Grown on a Re(0001) Surface.
CO Oxidation on Gold-Covered Pt(335), A Potential Sensor Electrode
The Interaction of Sulfur with Metal/Oxide Surfaces
Structure and Stability of ZrO2 Surfaces and the Ni/ZrO2 Interface
SS2-MoM
Diffusion of Hydrogen on Si(001) by Hot STM and Atomistic Modelling
Adsorbate Influence on the Diffusion of Individual Pt Atoms on Pt(110)
Diffusion of Hydrogen and Deuterium on Ni(111) over a Wide Temperature Range: Exploring Quantum Diffusion on Metal Surfaces
Hydrogen Inhibition of Exchange Diffusion on Pt(100)1
Diffusion of Pt Adatoms and Dimers on Pt(111)
In-Situ STM Experiments and Predictive Modeling of Grain Growth Kinetics in Two Dimensions.
Separating Out the Prefactor and the Step Edge Barrier of Interlayer Diffusion for Ag/Ag(111) Homoepitaxy
Surface Segregation of Low-Energy Ion-Induced Defects in Silicon
Quantum Coherence in Tip-Surface Transfer of Adatoms in AFM/STM
Elementary Steps of Lateral Translation of Cu, Pb, Pb2 and CO Studied by Low Temperature STM
TF+
Polycrystalline Silicon Thin Films for Active-Matrix Flat-Panel Displays
Characteristics of Amorphous and Polycrystalline Silicon Films Deposited at 120 °C by ECR-PECVD
Plasma Conditions for the as-grown Low Temperature Poly-Si Formation on the SiO2 Substrate by a Sputtering and PECVD Processes
Vacuum Deposition Processes for Large Area, Roll-to-Roll Flexible Substrates
Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Thin Films Deposited at Very Low Temperatures for Thin Film Transistors on Plastic Substrates.
Low Temperature Plasma Deposition of Silicon Nitride from Silane and Nitrogen Plasmas
Real Time Substrate Misalignment Monitoring and Recalibration
The National Technology Roadmap for Flat Panel Displays
VM+
Post Deposition Reduction of Noble Metal Doped ZnO Films
Development and Scale-Up of a Multifunctional Antireflection Coating, Sputter Deposited on Plastic Film
Product Manufacturability, Process Scale-up and Technology Transfer
The Transition to 300mm Silicon Wafer Process Equipment
Scale-Up for Semi-Conductors of Dual Magnetron Sputtering using Pulsed Power
Scaling Up of Sputtering Processes to Industrial Dimensions
Real-Time In-Situ Ellipsometric Studies for Rapid Scale-up of TiN Thin Film Growth by Magnetically-Enhanced Reactive Unbalanced Magnetron Sputtering
Sessions | Time Periods | Topics | Schedule Overview