AVS1996 Tuesday Morning

Comparison of Two Models and Equations for Predicting Electron Inelastic Mean Free Paths

Quantitative Analysis of Overlapping Spectral Features

Analysis of Carbide and Nitride Films by Auger Electron Spectroscopy

101 Uses for Eigenvectors

Advanced Data Analysis Techniques in XPS Quality Control Applications

Depth Profiling in XPS and AES by Means of Partial Intensity Analysis

An ARXPS Investigation of Nitrided Gate Oxides

Depth-Profiling by Angle-Resolved XPS

Pooling Analysis of Scanning Probe Microscopy Images

Fabrication and Analysis of Neuronal Networks

Preferential Adhesion of Glial Cells to Microcontact Printed Surfaces

Electrical Characterization of Uromyces Germ Tubes Grown on Integrated Circuit Substrates

Oligo(ethylene Oxide) Effects on Bacterial Attachment to Synthetic Solid Surfaces

Endothelial Cell Interactions with Model Surfaces: Effect of Surface Chemistry and the Adsorbed Protein Layer

Cell-Surface Interactions on Thiol Modified Gold Surfaces- an In-vivo Study in Mice and with Human Whole Blood In-vitro

Influence of Self-assembled Monolayer Defect Structure on Cell Growth

Differential Expression of Neurotransmitter Phenotypes in Cortical Cell Cultures Grown on Organosilane Surfaces

Porous Bioactive Glass (45S5) Templates for the In Vitro Synthesis of Bone-like Tissue

High Quality GaN Growth by MOVPE System with Three Flow Injection Reactor

Blue-Light Semiconductor Lasers: Status and Prognosis for Practical Devices

Rapid Thermal Processing of III-nitrides

Low Energy Electron Enhanced Etching of III-N Semiconductors in a Hydrogen/Chlorine DC Plasma

Comparison of Ohmic Metallization Schemes for InGaAlN

Electronic Structure of Wurtzite GaN(0001) from Angle Resolved Photoemission

ZnO as a Substrate for GaN

Optical Spectroscopy of GaN and Related Materials

STM Investigation of Zn Pre-Exposure of the GaAs(001)-(2x4) Surface for ZnSe Growth

Computational Simulation of Epitaxial Growth: Wide Bandgap Materials

Magnetic Dichroism Effect of Binary Alloys using Circularly Polarized X-ray

Magnetic Properties of Metastable Structures

Spin Polarized Photoelectron Diffraction from Gd(0001) Films

Spin-Resolved Resonant Photoemission at Fe 2p Core: Probe of Electron Correlation Effects

Resonant Enhancement of Magnetic Linear Dichroism Photoemission from Gd on Y(0001)

Vector Magnetometry in Ultrathin Magnetic Structures with Atomic Layer Resolution by Polarized Neutron Reflection

Spin-Resolved and Circularly-Polarized Resonant Photoemission: Study of Ni Above and Below the Curie Temperature

MEM SLIGA : Multiple X-ray Mask, Sacrificial Layer LIGA for Micromechanical Actuators

Materials Issues in Ferroelectric MEMS

Materials and Processes for Micro-Hotplate Gas Sensors

SiC Grown via Reaction of Fullerenes and Silicon for MEMS

Detail Studies of PMMA Development Rate in LIGA Process

Dry Etching of Deep Si Trenches for Released Resonators in a Cl\sub 2\ Plasma

Effect of Stress Concentrations on the Mechanical Properties of MEMS Materials

The Influence of Strengthening Mechanisms on Stress Relaxation in Thin Film Metallization

Prospects for Maintaining the Historical Reduction in Cost/Productivity

Technology Deployment and the National R&D Infrastructure

Contamination Control Challenges for ULSI Manufacturing

Research Infrastructure: What Is the Role of Universities?

Key Challenges for 300mm IC Manufacturing Equipment

Nonlinearity in Stick - Slip Dynamics

Tribological Characteristics of Novel Dichalcogenide Nanostructures and Oriented Films

AFM Studies of Corrosive Tribological Wear of Single Crystals

Atomic Scale Studies of Interfacial Shear and Adhesion

The Influence of pH on Adhesion and Friction of Oxide Surfaces in Electrolytes on Nanometer Scale: A Lateral Force Microscopy Study

Electrical Resistivity and Sliding Friction Measurements of Xe/Ag(111)

Silicon Coupling Agents as Microlubricants: Reaction with Silicon

Interfacial Force Microscope Studies of the Nanomechanical Properties of Au(111)

Mechanics of Self-assembled Monolayers: Measurement and Atomistic Simulations

Dislocation Nucleation at Nano-scale Contacts

Cl\sub 2\ Plasma-Si(100) Surface Interactions Studied by Angle- Resolved X-ray Photoelectron Spectroscopy and UV-visible Ellipsometry

Physical and Chemical Sputtering in Ion-assisted Etching in the Si/XeF\sub 2\/Ar\super +\-system

Measurements of Cl Atom - Surface Recombination Coefficients

Remote Plasma Chemical Dry Etching of Polycrystalline Silicon using NF\sub 3\/O\sub 2\ Gas Mixtures

Kinetic Study of Ion-Enhanced Polysilicon Etching using Cl, Cl\sub 2\ and Cl\super +\ Beam Scattering

On the Origin of the Notching Effect in Uniform High Density Plasmas

Competitive Mechanisms for Microscopic Uniformity during Electron Cyclotron Resonance Plasma Etching of Poly-Si in Cl\sub 2\ and Cl\sub 2\/O\sub 2\ Mixtures

The Ion-assisted Etching and Profile Development of Silicon in Chlorine

Sub Quarter-micron Polycrystalline Si1-xGex Gate Patterning in a High Density Plasma Helicon Source

Gas-Surface Dynamics and Profile Evolution during Etching of Silicon

Electron Beam Neutralization of Differentially Charged Large Aspect Ratio Features in a Cusped Field Helicon Plasma Etcher

Ultrahigh Vacuum Chemically Assisted Ion Beam Etching System with a Three Grid Ion Source

Dry Etching of InGaP in Magnetron Enhanced BCl\sub3\ Plasmas

Dry Etch Damage in III-V Semiconductors

Anisotropic Etching of InP with Low Sidewall and Surface Induced Damage in Inductive Plasma Etching using SiCl\sub 4\

Comparison of CH\sub 4\/Ar and CH\sub 4\/H\sub 2\/CO\sub 2\ Plasma Chemistries in Hydrocarbon RIE of InP-based Optoelectronic Devices

High-Density Plasma Etching of Compound Semiconductors

Plasma Etching of III-Nitrides in ICl and IBr

ECR RIE-Enhanced Low Pressure Plasma Etching of GaN/InGaN/AlGaN

Control of the Etching of III-V Semiconductors and Related Materials

Leed Intensity Analysis of ZnSe(100)-(2x2): Vacancy versus Rehybridized Structures

Bulk and Surface Photoelectron Diffraction and Holography of W(110)

Photoelectron Holographic Study of Atomic Structure of Ge Adsorbed on the Si(100) Surface*

Atomic Imaging with X-ray Holography

Structural Trends in Cu(110) Induced by Alkali Adsorption

Photoelectron Diffraction Study of Mn/Cu(001) C(2x2)

Structure Analysis of Ge Dimer on Si(001) by MEIS Blocking Profiles from Embedded Ge Layers

High Resolution XPS Studies of Ni(111)-2-butyne

The Bonding Configuration and Phase Diagram of the H/Be(0001) System

Bilayer Growth of In on Si(001)

Real Time Scanning Tunneling Microscopy of Hydrogen Desorption Process on Si(111) Surface

The Effect of Asymmetric Molecular Bonding on the Chemisorption of ICI on the Si(111)-7x7 Surface

Molecularly Chemisorbed Intermediates and the Implications for Direct Dissociation and Direct Molecular Chemisorption in Gas-Surface Dynamics

Collision Induced Desorption and Dissociation of O\sub 2\ on Ag(110) and Pt(111) Induced by Energetic Xe Atoms: Kinetics, Energetics and Branching Ratios

Collision Induced Desorption and Dissociation of Chemisorbed O\sub 2\ on Ag(001)

Diffusion of Single Pd Atoms on W(110): Second-Neighbor Jumps

Mechanistic Behavior of N-alkane Chains on Metal Surfaces

Anisotropy in the Lateral Momentum of CO Chemisorbed on Cu(110) Studied by Time-of-Flight ESDIAD

Understanding Gas/Surface Interactions from Direct Force Measurements using a Specialized Torsion Balance

Adsorption of Alkali Metals on Cu(100): The Transition from Isolated Atoms to Multilayers

Monte Carlo Simulations of Nucleation in Rectangular Trenches

Monte Carlo Simulation of Thin Film Deposition by Supersonic Molecular Beams

3 Layer Formalism for the Description of Ge Segregation during SiGe Alloy Growth by Molecular Beam Epitaxy

A Monte Carlo Simulation of the Physical Vapor Deposition of Nickel

Microstructural Studies and Simulation of Films Sputtered onto Non-planar Substrates

Across-Wafer Nonuniformity of Long-Throw Sputter Deposition

Enhanced Diffusion Rates of Two-dimensional Pt Clusters on Pt(111)

Surface Smoothing with Energetic Cluster Beams

Thin Film Growth via Low Energy Cluster Deposition: A Molecular Dynamics Study

The Origin of Plumes from Laser Irradiation of Wide Bandgap Insulators at Low Fluences

Advances in Pulsed Laser Deposition Technology and Diagnostics

Heteroepitaxial Growth of Conductive SrRuO\sub 3\ Thin Films by Pulsed Laser Deposition

Preparation of Crystalline TiC/ Amorphous DLC Composite Films using Magnetron Assisted Pulsed Laser Deposition

Crystalline Alumina Deposited at Low Temperature by Reactive Ionized Magnetron Sputtering

Intense Ion Beam Treatment of Materials

Morphology/Microstructure of Cu Films Fabricated via Directed Vapor Deposition

Aluminum-Silicon Carbide Interfaces: Effects of Ion Bombardment on Electronic Structure and Chemical Interactions

Measurements and Modeling of the Angular-Resolved Sputtering Yield of Ar - Sputtered Al by 100 to 1000 eV Ar\super +\