AVS1996 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, October 14, 1996
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-MoM
Chemical Imaging and Small Volume Analysis by Secondary Ion Mass Spectrometry
An Approach for 3D Quantification in Secondary-Ion Mass Spectrometry Analysis
Chemical Imaging with a Laser Desorption/Laser Postionization Mass Spectrometer
Laser Postionization of Sputtered Organics: A TOF-MS Study of Secondary Neutral Emission of Organic Overlayers
Temperature-Programmed Static SIMS of Silicon Wafers Modified with Photosensitive Silanes
Composition of Chemical Domains at Surfaces of Geological Materials by X-ray Absorption Microscopy
Comparative Magnetic-Field Imaging, Electric-Field Imaging, and Scanning Auger Microscopy Study of Metal-Matrix Composites
Combining Time of Flight SIMS with ESCA for Organic Surface Analysis
Scattering and Recoiling Imaging Spectrometry (SARIS)
BI+
What's Chemical Sensing Have to Do with Interfaces?
"Smart" Polymer-Protein Conjugates
An Electrochemical Method Towards Assembling Microscopic Arrays of Biological Receptors
Cell-Based Sensors
Combinatorial Chemistry
Advantages of Miniaturizing DNA-based Diagnostic Instrumentation
Influence of Surface Morphology in Surface-based DNA Computing
Physical Characterization and Hybridization Reactions of Surface-Bound DNA Probes
EM+
Chemical Reactions at Bonded Interfaces: Silicon Wafer Bonding
Physical Processes for Thin Silicon Film Exfoliation
Initial Oxide Formation on SiGe Studied by Ultrahigh Resolution XPS
The Surface Reaction during Silicon Oxidation Studied by MEIS
Selective Oxidation and Low pH Chemical Etching Route to Smooth Si(100) H-terminated Surfaces
Fundamental Chemistry of Molecular Precursors on Compound Semiconductor Surfaces
Photo Chemistry of Dimethylcadmium on Compound Semiconductor Surfaces
Novel Method for Growing CdS on CdTe Surfaces for Passivation and Heterojunction Formation
Metal Dependent Fermi-level Movement in the Metal/Sulfur-passivated InGaP Contact
Site-Specific Carbon Doping by MOVPE
FP-MoM
Digital Light Processing\super TM\: The Digital Window to the Networked Society
A DARPA Perspective on Flat Panel Displays
Field Emission Display Product Design
Measurements and Modeling of VUV Emissions from Opposed Electrode Flat Panel Display Pixels
Optical Interference Lithography for Field Emission Flat Panel Displays.
Characterizing Flat Panel Display Materials using Quadrupole-based SIMS
Design for Manufacture of FPD Modules
MS-MoM
The Application of Advanced Process Control to Semiconductor Manufacturing in Today's Factories
Neural Network - Plasma Process Implementations in Production
FDC/MBPC, Current and Near Term Possibilities in SC Manufacturing
Advanced Process Control in Plasma Processing
A Production Evaluation of Real-Time Statistical Process Control on a Sub-0.5\micron\m TCP Metal Etch Process
Advanced Process Control - How Outside Expertise Can Help
NS-MoM
Scanning Thermal Microscopy at Sub-10 nm Spatial Resolution
Infrared Detection and Imaging using Microcantilevers
Thermovoltage in Scanning Tunneling Microscopy
Functionalization of STM Tips with C\sub 60\
Distinguish between Adatoms in Faulted and Unfaulted Halves of Si (111) 7x7 by Noncontact Atomic Force Microscopy
Non-Optical Feedback in Scanning-Probe Microscopes using a Piezo Tuning Fork as a Sensor
Molecular and Nanoscale Electronic Properties of Organic Thin Films
Probing the Nano-defect Induced CDW Metastable States by Low-T UHV STM
Surface Science at LHe Temperatures with a New Dedicated Low Temperature UHV STM System
A Novel UHV SPM Capable of Three-Axis Movement, Variable Temperature Imaging and MFM
PS1-MoM
Langmuir Probe Measurements in a Planar Inductive Coupled RF Discharge
Plasma Uniformity Study in a 300mm Inductively Coupled Oxide Etch Tool with Diagnostics and Simulations
Assessment of Coil Design and Internal Structures on Ion Flux Uniformity using a 3-Dimensional Model of Inductively Coupled Plasma Tools
Numerical Modeling of Neutral Gases in High Density Plasmas
Robot Assisted Three Dimensional Optical Emission Tomography of Inductively Coupled Plasma
Determination of Plasma Electron Temperatures by Trace Multiple Rare Gas Optical Emission, and Applications of Advanced Actinometry in High-Density Plasmas
Fine Pattern Etching by Parallel Plate Type Reactor in Low Operating Pressure using Plasma Transport from Gas Puff Plasma Source
Electron Temperature Control using Mesh Grid Bias and its Application in CF\sub4 \/Ar Plasma
Fast Dry Etching with New High-Density Plasma Source
Full Wave Helical Resonator: The First Capacitively Compensated Inductive Plasma Source
PS2-MoM
Plasma Properties and Gas Phase Reactions in Inductively-Coupled High Density Plasma Chemical Vapor Deposition
DSMC Simulation of Reactor Feature Scale Flows
Reactivity Measurements of SiH in the Deposition of a-Si:H from Silane and Disilane Plasmas using Plasma Enhanced Chemical Vapor Deposition
A Growth Model for the Fast Deposition of a-Si:H
Influence of Gas Phase Species on Silicon Oxide Film Properties for Films Deposited using ECR TEOS + O\sub 2\ and Silane + O\sub 2\ Plasmas
A Study of the Mechanisms of Deposition of SiO\sub 2\ by PECVD of Alkoxysilanes
Microwave Spectroscopic Measurements of Oxidation Products in TEOS/Oxygen ECR Silicon Oxide Deposition Plasmas
Atomic Absorption Measurements of Silicon in ECR Oxide Deposition Plasmas
Measurement of Ion Enhanced Deposition during PECVD of SiO/sub/2 using the Effect of Glass Substrates on Deposition Rate
Electrical Properties of Plasma Fluorinated Silicon Oxide Films Deposited at Room Temperature
Effect of Temperature on Plasma-induced Charging Damage in PECVD Processes
SS+
Real-Time Photoelectron Emission Microscopy of Lubrication on a Real Surface
Fluid Structure, Dynamics, and Solvation Forces in AFM
Adhesion Force Analysis of Interactions between AFM Tips and Substrates Modified with Organosilanes
Tribological Atomic Force Microscopy Studies of Grafted Organo-Silanes Monolayers
Friction and Adhesion at an Incommensurate Solid-Solid Interface
External and Internal Vibrations of Large Hydrocarbons Adsorbed on Metal Substrates
Surface Reactivity and Frictional Properties of Titanium Carbide (100)
Use of Sputtering and Negative Carbon Ion Sources to Prepare Carbon Nitride Films
Reduction of Friction through Finite-Size Effects
Tapping Mode/Phase Imaging of Composite Surfaces
UHV Friction Force Microscopy Studies of Ionic Materials
SS1-MoM
The Dissociative Adsorption of Hydrogen: From Simple Metals to Alloys
Vibrationally Resolved Core Level Photoemission of Chemisorbed Hydrocarbons
Influence of Adsorbates on the Ultrafast Electron Dynamics in Image Potential States at a Metal Surface
Femtosecond Photoemission Study of Electron Relaxation in Two-dimensional Layered Electron System
Measurements of Surface State Transitions on the Bare Diamond C(100) and C(110) Surfaces
Surface Fermi Contours and Phonon Anomalies on H/W(011)
Surface Electronic Structure of GaN(0001)
Photoemission Study of As/InP(110)
Strain-induced Depopulation of the Surface State in Epitaxial Ag Films on Si(111)
SS2-MoM
Visible-Light-Induced Etching of Br/GaAs(110)
Photo-Dynamics and Molecular Orientation of Ethyl Bromide on GaAs(110)
Vibrational Excitation Dynamics in Photodesorption.
Hot Electron Femtochemistry at Surfaces using Tunnel Junctions
Femtosecond Laser-induced Desorption of CO from Cu(100): Comparison of Theory and Experiment
Rotational and Translational Energy Distributions of CO Photodesorbed from Ag(111)
Thermal and Photon-induced Desorption of NH\sub 3\ and ND\sub 3\ from Ag(111)
Physisorption and Photodesorption of Formyl Fluoride on Ag(111)
Translational Energy Measurements from Bimolecular Photoreactions on Pt(111)
H\sub 2\O Resonant Desorption from Ice Multilayers using the Mark III Infrared Free Electron Laser
TF+
Microstructural Development in Cubic Boron Nitride Films
Growth Mechanism and Structural Studies of Sputtered PbTiO/sub 3/ Thin Films Epitaxially Grown on Miscut (001) SrTiO/sub 3/
Texture Development and Surface Morphology of Polycrystalline Al Films Deposited by Magnetron Sputtering on Epitaxial W(001) and Ti\sub x\W\sub 1-x\(001) Underlayers
Studies on Growth Texture in Fe and FeTaN using Under Layers
Nucleation and Growth of Aluminum Films on Sapphire (0001)
Tayloring of Titanium and Boron Nitride Films by Energy Controlled Plasma Beam Processes
Mass Spectroscopic Analyses of the Pathways for "Reactive" Species Incorporation during Reactive Magnetron Sputtering
The Effect of Oblique Sputtering on Microstructural Modifications of ZnO Thin Films
Ti\sub 1-x\Al\sub x\N-CrN Multi-layer PVD Films Deposited by a Reactive Unbalanced Magnetron Sputtering Technique
VT-MoM
A Very Low Cost and High Reliability Flangeless Bellowless Aluminum Alloy Vacuum Beam Pipe in a High Energy Accelerator
The Surface Analysis and ESD Test on Ozone Gas Treated Aluminum Alloy
Operational Experience of Novel Vacuum Chambers Incorporating Massive Titanium-Sublimation Pumping in the CESR Interaction Region
Installation of a 14mm Vacuum Chamber for an Undulator in the 1.3 GeV Storage Ring at SRRC
Calculated Physical Adsorption Isotherms of Neon and Radon on a Heterogeneous Surface
Fabrication and Performance of the APS Accelerator Vacuum Systems
Study of Distributed Ion-pumps in CESR
Tests of an Environmentally Safe UHV Cleaning Process for BNL Accelerators and Storage Rings
Fine Structure Dependent Hydrogen Permeation in Titanium Nitride Films for Extremely High Vacuum Application
Synchrotron Radiation Induced Desorptions on Aluminum Surfaces
Sessions | Time Periods | Topics | Schedule Overview