AVS1996 Monday Afternoon

Ion Beam Damage during Sputtering

The Effects of Oxygen Flooding on Sputtering and Ionization Processes during Ion Bombardement

Optimized TOF-SIMS Depth Profiling with a Dual Beam Technique

Accurate Concentration Depth Profiling of Alkali Elements in Bulk Glasses by SIMS

SIMS Analysis of Autodoping of Undoped Oxide in Chambers which Deposit Doped and Undoped Oxides

Role of Desorption Methods on Quantitative Surface Analysis by Laser Postionization Mass Spectrometry

AES Depth Profiling- Pitfalls and Work Arounds

Auger Depth Profiling of Deeply Buried Thin Layers

XPS Characterization of Semiconductor Thin Films using Simultaneous Mg/Zr Excitation

Biomolecular Architectures at Solid Substrates

Peptide-Antibody Recognition on Well Defined Surfaces Studied by Surface Plasmon Resonance

Molecular Recognition at the Protein-Biomineral Interface

Biological Characterisation of Materials

Immobilization and Patterning of Functional Proteins on Surfaces

Functionalized Self-assembled Films to Control Biological Responses

Correlation of Culture Stratum Composition and Cell Properties of Three Cell Types Grown on SAMS by XPS

Cysteine and Gly-Gly Adsorption and Desorption on Pt(111)

High Resolution MEIS Characterization of Oxynitride Films on Si(100)

X-ray Photoelectron Study of Nitrogen Incorporation into Silicon Dioxide Thin Films

Nitrogen Incorporation at the Top Surface of Ultra-thin Gate Oxides by Low-temperature Plasma-assisted Processing

Atomic Layer Controlled Al\sub 2\O\sub 3\ Films Grown on Si(100) Using Binary Reaction Sequence Chemistry

SiO2/Si Interface Structures and Electrical Properties

Ballistic Electron Emission Spectroscopy and Monte Carlo Simulations of Hot Electron Transport through MOS Structures

Ballistic-Electron Emission Microscopy Characterization of Hot-Electron-Induced Trapped Charge in SiO\sub 2\

Effect of Surface Roughness on 5 Nm Oxide Charge Trapping and Fowler-Nordheim Tunneling Behavior -- Experiment and 3D Simulation

Evolution of Si/SiO\sub 2\ Interfacial Roughness during ECR Plasma Oxidation

Magnetic Force Microscopy and Micromagnetics

Direct Comparison of Magnetic Imaging using SEMPA and MFM

Cross-Tie Walls on the Surface of Permalloy Films Studied by SEMPA

A High-Resolution Photoemission Electron Microscope for Chemical and Magnetic Imaging, and Micro-Spectroscopy

Quantitative Magnetic Force Microscopy on Ferromagnetic and Superconducting Materials

Wrinkled Magnetization in Ultrathin Ferromagnetic Films

Low Temperature Magnetic Force Microscopy of Vortices in YBa\sub 2\Cu\sub 3\O\sub 7\\sub -\\sub x\ Thin Films

Magnetic Depth Profiling and Domain Imaging of Patterned Magnetic Films using Scanning Ion Microscopy with Polarization Analysis (SIMPA)

Commercialization of MEMS

Similarities and Differences Surface Micromachined MEMS and IC's

Electrostatically Actuated Test Structures for MEMS Process Monitoring

Out-of-Plane Microstructures using Stress Engineering of Thin Films

Molding of High Aspect Ratio Microstructures

Simulation of Rarefied Flows in MEMS Device

Fault Detection and Process Control Projects at Sematech

Fault Detection and Process Control under Development in the University Community - What is Possible in the Future?

Experimental Study of RGA High Pressure Performance (II)

Equipment and Process Fault Detection and Classification in PolySi RTCVD

Stabilization of a Plasma-enhanced CVD Process using Quadrupole Mass Spectrometry

Process Control and Diagnostics by Means of Self Excited Electron Resonance Spectroscopy (SEERS)

Run by Run Uniformity Control on a Dual Coil Transformer Coupled Plasma Reactor with Full Wafer Interferometry

An Artificial Neural Network EWMA Controller for Semiconductor Processes

Near- and Far-Field Imaging Spectroscopies

Scanning Near-field Optical Microscope for Single Molecule Imaging at Cryogenic Temperatures

Super-Resolution Fluorescence Imaging of Single Dye Molecules in Thin Polymer Films and on Glass Surfaces

Mie Scattering in Nanoscale Particles as Observed by Near-field Scanning Optical Microscopy (NSOM)

Optical Fiber Structures Studied by a Tapping-mode Scanning Near-field Optical Microscope

Polarization of Light Emitted from the STM Tunnel Junction

Luminescence from GaAs(100) Excited by a Scanning Tunneling Microscope

Selective Scanning Tunneling Microscope-Induced Photon Emission from Self-assembled Monolayer and Dye-coated Surfaces

Near-field Optical Recording on Cyanine Dye Layer of a Commercial Compact Disk-recordable (CD-R)

Mechanistic Studies of SiO\sub 2\ Etching Processes in an Inductively-Coupled High-Density Plasma Reactor

Kinetics of Polymer Film Growth during Selective Oxide Etching in a Low-Pressure High-Density Plasma Reactor

Fluorocarbon Species Measurement and Modeling for Low Pressure, High Density SiO\sub 2\ Plasma Etching

Residence Time Effect on SiO\sub 2\/Si Selective Etching in High Density Fluorocarbon Plasma

Investigation of Plasma Precursors in Selective HDP Etching

Effects of the Magnetic Field on the Reduction of the Dielectric Window Damage Due to Capacitive Coupling in the Inductively Coupled Plasma

CF\sub X\(X=1-3) Radical Densities during SiO\sub 2\, Si\sub 3\N\sub 4\ and Si Etching Employing ECR-CHF\sub 3\ Plasma

Remote Plasma Etching of Silicon Nitride and Silicon Dioxide using NF\sub 3\/O\sub 2\ Gas Mixtures

Electron and Ion Kinetics in SiF\sub 4\

First Principles Predictions of Reaction Mechanisms on Si(100)-2x1

Hyperthermal H Atom Interactions with D/Si(100)

Effects of Impurities on Hydrogen Desorption from Si(100)

The Effect of Foreign Adatoms on Silicon Surface Chemistry

In Situ Studies of Growth and Reaction of Amorphous Silicon Hydride Films: Abstraction, Insertion and Etching by Atomic Deuterium

Hydrogen Desorption from Ion-roughened Si(100)

Mechanism in the Growth Related Photodecoposition of Disilane on Si(100)

Diborane Reactions on Si(001) Investigated by Temperature Programmed Desorption

Giant Surface Friedel Oscillations: STM Study of Be(0001)

Core Hole Decay Mechanisms in Ru Studied by Auger-Photoelectron Coincidence Spectroscopy

Surface Plasmon Dispersion and Damping on Ag Surfaces Revisited with EELS-LEED

Surface Investigations of an AlPdMn Quasicrystal and a Related Crystalline Alloy

Synchrotron Radiation Photoemission from Photoionization to Electron Holography

The Interfaces of Model Bimetallic Systems: A Core-level Photoemission Study

A Symmetry Selective View of the Chemical Bonding of Organic Acids on Cu(110)

Surface and Layer Electronic Structure of the Organic Superconductor \kappa\(BEDT-TTF)\sub 2\Cu[N(CN)\sub 2\]Br

The Electronic Structure of Oxidised Aluminium Surfaces Studied by (e,2e) Spectroscopy

Mechanical Properties of Thin Films and its Interface

Atomistic Simulations of the Nanometer-scale Indentation of Thin Films

Correlation of Film Stress and the Nano-Mechanical Properties of Au Thin Films

Nanoindentation of Surfaces: Calculations of the Onset of Near-Surface Plasticity

Mechanical Properties of Epitaxial Mo/NbN and W/NbN Superlattices

Multilayer Film Deposition of TiN\sub X\/AlN\sub X\ on a Rotating Substrate from Reactive Sputtering of Elemental Targets of Titanium and Aluminum

Formation and Optimization of Multiphase Film Properties of (Ti-Cr)N formed by Cathodic Arc Deposition

Preparation and Characterization of Superhard CNx/ZrN Multilayers

Optical Characterization of Carbon Nitride Thin Films Prepared by rf Sputtering

Thin Film Challenges and Opportunities in the Development of Gas Microsensor Arrays

Controlled Growth of WO\sub 3\ Gas Sensing Thin Films

In Situ Resistance Characterization of Oxide Thin Film Growth Phenomena

Reduced-Coordination Cation Sites at Surface Oxygen Vacancies on SnO\sub 2\(110)

Interfacial and Electronic Properties of SiC-based Schottky Diode Gas Sensors Annealed at 425 C

Characterization of the Resistance Change Produced by H\sub 2\, H\sub 2\S, CO, and O\sub 2\ Adsorption onto Iron Films

Formate Adsorption on Epitaxial Cu(100) Films: Broadband Reflectance and dc Resistance

Accurate Vacuum Measurements; How and Why

Fabrication and Test of an Automatic Static Expansion System for Vacuum Gauge Calibration

A Novel Primary Pressure Standard for Calibration in the mTorr Range

Measurement Performance of Capacitance Diaphragm Gages and Alternative Low-pressure Transducers

Cold-Cathode Gauges for Ultra-High Vacuum Measurements

Linearization of the Spinning Rotor Gage Response for Pressures up to 100 Pa

A Precision Gas Flowmeter for Vacuum Calibration

International Comparison of Leak Standards using Calibrated Capillary Leaks

Calibration of an Axial-symmetric Transmission Gauge in Ultrahigh and Extreme High Vacua