ALD/ALE 2024 MoA Sessions , Monday, August 5, 2024 1:30 PM
Monday Afternoon
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Topic | Session Name |
|---|---|---|
| AA1-MoA | AA | Energy: Batteries and Energy Storage |
| AA2-MoA | AA | Applications in ULSI FEOL: Gate Electrodes & Contact Metals, High-K, and 3D Transistor Fabrication |
| AF-MoA | AF | Precursors and Chemistry: Precursor Design, New Precursors, Process Development I |
| ALDALE-MoA | ALDALE | Student Awardees |
| ALE-MoA | ALE | ALD+ALE and Emerging Topics in ALE |
| AS-MoA | AS | Selective ALD by Area-Deactivation |