ALD/ALE 2022 Wednesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
Session | Wednesday, June 29, 2022 | ||||||
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10:45 AM | 11:45 AM | ||||||
AA1-WeM2 |
Atomic Layer Deposition of Perovskite K(Tax,Nb1-x)O3 films on Silicon for Integrated Photonics via KOtBu and H2O
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Low-temperature ALD Sb2Te3 for Self-powered Broad-band Photodetector
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Preparation of High Mobility Indium Hydroxide Doped by Atomic Layer Deposition and Study on Photoelectric Properties
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ALD MgF2 Using (EtCp) 2Mg and SF6 Remote Plasma Source
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Moisture Sensitivity of ALD Metal Fluorides for Far UV Optical Coatings
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AA2-WeM2 |
Sub 10-nm Ferroelectric HfO2 Capacitors Doped with Gd
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Controlling Stochastic Resistive Switching in Organic-Inorganic Hybrid Memristor by Vapor-Phase Infiltration
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Atomic Layer Deposited Vanadium Oxide Thin Films for Thermocromic and Microelectronic Applications
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Brain-Based Inspiration: Towards Neuromorphic Computing With ALD Based Memristive Devices
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EM-WeM2 |
Deposition of Copper-based Metal-Organic Framework Thin Film by Molecular Layer Deposition
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ALD-Grown ZIF-8 Thin Films : Mechanism Insight Leads to Push Beyond the Current Thickness Limit
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Molecular Layer Deposition of Zeolitic Imidazolate Framework 8 Thin Films
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Mld of Phosphane-Ene Polymer Thin Films: Bringing Solution Polymer Chemistry to a Gas Phase Process
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Molecular Atomic Layer Deposition of Inorganic-Organic Hybrid Dry Resist for EUV Application
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NS-WeM2 |
Atomic Layer Deposition of Layered Chalcogenides
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2D Alloys of WS2 and NbS2 by PEALD
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2D Molybdenum Dichalcogenides by Atomic Layer Deposition
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Plasma-enhanced Atomic Layer Deposition of Crystalline MoS2 Thin Films Using a Novel Precursor
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