ALD/ALE 2022 Wednesday Morning
Sessions | Time Periods | Topics | Schedule Overview
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Click a Session in the first column to view session papers.
| Session | Wednesday, June 29, 2022 | ||||||||||
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| 8:30 AM | 9:30 AM | 10:30 AM | |||||||||
| PS-WeM1 |
Welcome, Introductions and Sponsor Thank Yous
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ALD 2022 Innovator Awardee Talk: Prospects of Atomic Layer Deposition for Cell-Stacking Technology of Semiconductor Memory Devices
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ALD Student Award Finalist Talk: Improving Self-Aligned Atomic Layer Deposited Gate Stacks for Electronic Applications
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ALD Student Award Finalist Talk: Towards High Throughput Molecular Layer Deposition of Alucone Films
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ALD Student Award Finalist Talk: In-situ FTIR Analysis of Selectivity Loss Mechanism of TiO2 Atomic Layer Deposition on Aminosilane-Passivated SiO2 and H-terminated Si
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ALD Student Award Finalist Talk: Sacrificial Etching Kinetics Control Extent of Pattern Alignment in Area-Selective Atomic Layer Deposition (AS-ALD) via Simultaneous Deposition and Etching
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ALD Student Award Finalist Talk: Depositing Metal Oxides on Metalcones: Enhancing Initial Growth Through O2 Plasma Densification
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Break & Exhibits
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