ALD/ALE 2022 Tuesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, June 28, 2022
8:30 AM 9:30 AM 10:30 AM
PS-TuM1
Welcome, Introductions and Sponsor Thank Yous
Plenary Lecture: Atomic Layer Etching: Real World Utilization and Future Outlook
ALD 2021 Innovator Awardee Talk: Up, Down and All Around: Controlling Atomic Placement in ALD
ALE Student Award Finalist Talk: Direct Integration of HfO2 ALD and Surface Selective ALE for Controlled HfO2 Film Growth
ALE Student Award Finalist Talk: First-principles Insight into Non-equilibrium Chemistry in PEALE of Silicon Nitride with Hydrofluorocarbons
Break & Exhibits
Sessions | Time Periods | Topics | Schedule Overview