ALD/ALE 2022 Tuesday Morning
Sessions | Time Periods | Topics | Schedule Overview
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| Session | Tuesday, June 28, 2022 | ||||||||||
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| 8:30 AM | 9:30 AM | 10:30 AM | |||||||||
| PS-TuM1 |
Welcome, Introductions and Sponsor Thank Yous
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Plenary Lecture: Atomic Layer Etching: Real World Utilization and Future Outlook
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ALD 2021 Innovator Awardee Talk: Up, Down and All Around: Controlling Atomic Placement in ALD
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ALE Student Award Finalist Talk: Direct Integration of HfO2 ALD and Surface Selective ALE for Controlled HfO2 Film Growth
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ALE Student Award Finalist Talk: First-principles Insight into Non-equilibrium Chemistry in PEALE of Silicon Nitride with Hydrofluorocarbons
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Break & Exhibits
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