ALD/ALE 2022 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
Session | Monday, June 27, 2022 | ||||||
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10:45 AM | 11:45 AM | ||||||
AA-MoM2 |
Atomic Layer Deposition for Silicon-Perovskite Tandem Cells
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ALD Al2O3/SiOx Multilayers for c-Si Surface Passivation: Modification of Interface Properties by Voltage Stress and Plasma Treatments
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Atomic Layer Deposition of Aluminium Doped Zn1-XMgXO as Transparent Conducting Films for Photovoltaics
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An in-Situ Infrared Spectroscopy Study on the Influence of ALD SnO2 on Formamidinium-Based Metal Halide Perovskite
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AF1-MoM2 |
Atomic Layer Deposition of Ruthenium Dioxide Thin Films Based on Redox Reactions between RuO4 and Alcohols
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Low Temperature ALD of Ni from Novel Precursors
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Enhanced Cation Control in ALD of Alkali Metal Containing Films by Avoiding Water-Reservoir Effects
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Atomic Layer Deposition of Lead Halides: PbBr2 and PbCl2
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Carbene Based Precursors for the ALD of Coinage Metals
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Low Temperature ALD of Metals and Nitrides Using Thermally Generated Radical Precursors
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AF2-MoM2 |
Influence of the High Aspect Ratio Geometry to ALD Thin Film Growth
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Ultra-Low Temperature ALD of Pure Antimony for Grain Boundary Engineering of Thermoelectric Materials
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Infilling Macroscopic Nanoparticle Networks via ALD
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Zinc Acetylacetonate on Mesoporous Supports by Atomic Layer Deposition
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Synthesis of High Surface Area Metal Oxide Catalyst Supports
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ALD on Porous Substrates: From General Formulation to Fibrous Substrates and Scaling Laws
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ALE-MoM2 |
Photon-Activated Metal Ale
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Plasma-Assisted Thermal-Cyclic Etching of Silicon Germanium Selective to Germanium
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Thermal Atomic Layer Etching of Cobalt with Chlorine Plasma and Hexafluoroacetylacetone (Hhfac)
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Thermal-Cyclic Atomic Layer Etching of Cobalt by Plasma Oxidation and Organometallization
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