ALD/ALE 2022 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, June 27, 2022
10:45 AM 11:45 AM
AA-MoM2
Atomic Layer Deposition for Silicon-Perovskite Tandem Cells
ALD Al2O3/SiOx Multilayers for c-Si Surface Passivation: Modification of Interface Properties by Voltage Stress and Plasma Treatments
Atomic Layer Deposition of Aluminium Doped Zn1-XMgXO as Transparent Conducting Films for Photovoltaics
An in-Situ Infrared Spectroscopy Study on the Influence of ALD SnO2 on Formamidinium-Based Metal Halide Perovskite
AF1-MoM2
Atomic Layer Deposition of Ruthenium Dioxide Thin Films Based on Redox Reactions between RuO4 and Alcohols
Low Temperature ALD of Ni from Novel Precursors
Enhanced Cation Control in ALD of Alkali Metal Containing Films by Avoiding Water-Reservoir Effects
Atomic Layer Deposition of Lead Halides: PbBr2 and PbCl2
Carbene Based Precursors for the ALD of Coinage Metals
Low Temperature ALD of Metals and Nitrides Using Thermally Generated Radical Precursors
AF2-MoM2
Influence of the High Aspect Ratio Geometry to ALD Thin Film Growth
Ultra-Low Temperature ALD of Pure Antimony for Grain Boundary Engineering of Thermoelectric Materials
Infilling Macroscopic Nanoparticle Networks via ALD
Zinc Acetylacetonate on Mesoporous Supports by Atomic Layer Deposition
Synthesis of High Surface Area Metal Oxide Catalyst Supports
ALD on Porous Substrates: From General Formulation to Fibrous Substrates and Scaling Laws
ALE-MoM2
Photon-Activated Metal Ale
Plasma-Assisted Thermal-Cyclic Etching of Silicon Germanium Selective to Germanium
Thermal Atomic Layer Etching of Cobalt with Chlorine Plasma and Hexafluoroacetylacetone (Hhfac)
Thermal-Cyclic Atomic Layer Etching of Cobalt by Plasma Oxidation and Organometallization
Sessions | Time Periods | Topics | Schedule Overview