ALD/ALE 2021 Tuesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Tuesday, June 29, 2021 | ||||||||||||||||||||||||||||||||||
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| 9:30 AM | 10:30 AM | 11:30 AM | |||||||||||||||||||||||||||||||||
| LI-ALE-TuM3 |
Welcome, Thank Yous, & Instructions
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Atomic Scale Profile Control in Fine Pitch Patterning and High Aspect Ratio Contact Hole Etching
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Nanoscale Cryogenic Process for Highly Selective Etch of Si3N4 Over Si
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Using Selective Surface Functionalization of SiNx to Increase SiO2 to SiNx ALE Selectivity
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Etch-stop Mechanisms in Plasma-assisted Atomic Layer Etching of Silicon Nitride: A Molecular Dynamics Study
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BREAK
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Landscape of Spontaneous Etch via Ligand-Exchange in Thermal Atomic Layer Etching
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Mechanisms of Self-Limiting Processes in Thermal Atomic Layer Etching of Nickel by β-diketones
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Oxidation Influences Etch Quality in the Low-Temperature Thermal ALE of Copper
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Thermal Atomic Layer Etching of Al2O3 and AlN Using HF or XeF2 for Fluorination and BCl3 for Ligand-Exchange
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Closing Remarks & Thank Yous
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