ALD/ALE 2021 Tuesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Tuesday, June 29, 2021 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| 9:30 AM | 10:30 AM | 11:30 AM | 12:30 PM | 1:30 PM | |||||||||||||||||||||||||||||||||||||||||||||||||||||||
| LI-ALD-TuM2 |
Welcome, Thank Yous & Instructions
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ALD Growth of Low Work Function Metal Gate for FinFET Technology
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Atomic Layer Deposition of GeTe/Sb2Te3 Superlattice for Large-Capacity and Low-Power Phase Change Memory
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Atomic Layer Deposited p-type SnO Thin Films with c-axis Preferred Orientation and the Associated Device Applications
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Atomic Layer Deposition of Highly Conductive Co9S8 Thin Films Using Diamine Adducts of Cobalt(II) Halides and H2S
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BREAK
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ALD-Oxide Materials and Surface Modification for Next-Generation PV Devices
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Particle Atomic Layer Deposition as an Effective Way to Enhance the Li-S Battery Energy Density
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Advanced ALD Technologies Platform to Enable Future Applications and Scaling & Review of Emerging Applications for Sensors, Mems, Energy Harvesters, Transparent Electronics and Coated Powder for Composites
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Molecular Layer Deposition of Li-Ion Conducting "Lithicone" Solid Electrolytes
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Atomic-Level Precision at Large Scale: Opportunities and Challenges of ALD
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BREAK
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ALD in Photovoltaics: From Extremely Thin to Ultrathin Layers, Physical Insight, and Chemical Methods Development
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Demonstration of Pt-Wire Temperature Sensors Fabricated by Atomic-Layer 3D Printer Using MeCpPtMe3 and O3
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Optimization of 1D Core-Shell Heterostructures for Gas Sensing
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Bridging the Synthesis Gap in Vapor-Phase Deposition using Ionic Liquid as Solvent
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A Model of ALD Particle Coating in Fluidized Bed Reactors: Comparison With Experiments and Other Particle Coating Techniques
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Closing Remarks & Thank Yous
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