ALD/ALE 2021 Tuesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, June 29, 2021
9:30 AM 10:30 AM 11:30 AM 12:30 PM 1:30 PM
LI-ALD-TuM2
Welcome, Thank Yous & Instructions
ALD Growth of Low Work Function Metal Gate for FinFET Technology
Atomic Layer Deposition of GeTe/Sb2Te3 Superlattice for Large-Capacity and Low-Power Phase Change Memory
Atomic Layer Deposited p-type SnO Thin Films with c-axis Preferred Orientation and the Associated Device Applications
Atomic Layer Deposition of Highly Conductive Co9S8 Thin Films Using Diamine Adducts of Cobalt(II) Halides and H2S
BREAK
ALD-Oxide Materials and Surface Modification for Next-Generation PV Devices
Particle Atomic Layer Deposition as an Effective Way to Enhance the Li-S Battery Energy Density
Advanced ALD Technologies Platform to Enable Future Applications and Scaling & Review of Emerging Applications for Sensors, Mems, Energy Harvesters, Transparent Electronics and Coated Powder for Composites
Molecular Layer Deposition of Li-Ion Conducting "Lithicone" Solid Electrolytes
Atomic-Level Precision at Large Scale: Opportunities and Challenges of ALD
BREAK
ALD in Photovoltaics: From Extremely Thin to Ultrathin Layers, Physical Insight, and Chemical Methods Development
Demonstration of Pt-Wire Temperature Sensors Fabricated by Atomic-Layer 3D Printer Using MeCpPtMe3 and O3
Optimization of 1D Core-Shell Heterostructures for Gas Sensing
Bridging the Synthesis Gap in Vapor-Phase Deposition using Ionic Liquid as Solvent
A Model of ALD Particle Coating in Fluidized Bed Reactors: Comparison With Experiments and Other Particle Coating Techniques
Closing Remarks & Thank Yous
Sessions | Time Periods | Topics | Schedule Overview