ALD/ALE 2021 Tuesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, June 29, 2021
9:30 AM 10:30 AM 11:30 AM 12:30 PM 1:30 PM
LI-ALD-TuM1
Welcome, Thank Yous & Session Instructions
Atomic Layer Deposition of Amorphous/Nanocrystalline Phase-Composite Nanolayers
Density Functional Study on ALD Precursors for Hexagonal Boron Nitride Deposition
A Novel co-Precursor Approach for Atomic Layer Deposition of Various Semiconductor Thin Films
Tuneable YAlOx Protective Coatings Against Plasma Damage to Meet the Requirements in Future Semiconductor Fabrication Processes
BREAK
ALD of Boron Nitride by Polymer Derived Ceramics chemistry
Process Parameter and Substrate Dependence of Sticking Coefficients in Atomic Layer Deposition Processes
Volatile Cerium and Ytterbium Precursors for Atomic Layer Deposition: Synthesis, DFT and Application
Predicting Precursor Volatility With Machine Learning
Surface Chemistry of Deposition and Etch from First Principles Simulations
BREAK
Atomic Layer Deposition of Functional Dielectrics and Metals for the Emerging Non-Volatile Memories
Crystallinity Control via Atomic Level Scaffolding
Plasma-Enhanced Atomic Layer Deposition of Copper Oxide Semiconductors With Tunable Phase, Oxidation State, and Morphology for P-Type Thin Film Transistors
Tuning Coercive Field and Polarization in Inherently Ferroelectric HZO Film Deposited Using HfD-04 and ZrD-04
Ferroelectric Devices: From Applications to Microstructures
Closing Remarks & Thank Yous
Sessions | Time Periods | Topics | Schedule Overview