ALD/ALE 2021 Sunday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Sunday, June 27, 2021 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| 10:00 AM | 11:00 AM | 12:00 PM | 1:00 PM | 2:00 PM | |||||||||||||||||||||||||||||||||||||||||||||||||||||||
| TS1-SuM |
Tutorial Opening Remarks & Welcome
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ALE and ALD: Two Biotopes of a Kind in Atomic-Scale Processing
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BREAK
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Fundamentals of Atomic Layer Deposition: An Introduction ("ALD 101”)
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BREAK
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Let's Talk Dirty - Battling Impurities in ALD Films
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BREAK
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Seeing Is Believing: In situ Techniques for Atomic Layer Deposition (ALD) Process Development and Diagnostics
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BREAK
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ALD Powder Manufacturing
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Closing Remarks & Thank You!
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