ALD/ALE 2021 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, June 28, 2021
10:00 AM 11:00 AM 12:00 PM 1:00 PM 2:00 PM
LI-MoM
Opening Remarks & Welcome
Plenary Lecture: Materials & Innovation - Essential Elements that Underpin the Next Industrial Revolution
Introduction to ALD and ALE Student Finalists
ALD Student Award Finalist Talk: Enhanced Surface Adsorption in Electric Field/Potential Assisted Atomic Layer Deposition (EA-ALD) of Ultrathin Ru Film
BREAK
ALD Student Award Finalist Talk: What Controls the Conformality of Plasma ALD in High-Aspect-Ratio Applications?
ALE Student Award Finalist Talk: Modelling Atomic Layer Etching of Thin Film Metal Oxides
ALD Student Award Finalist Talk: Surface Passivation Using Aminosilanes for Area-Selective Atomic Layer Deposition
ALD Student Award Finalist Talk: Electron-Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using (DMBD)Ru(CO)3
Plenary Lecture: Mechanisms of Thermal Atomic Layer Etching
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Introduction to 2021 ALD Innovator Awardee Stacey Bent, Stanford University, USA: Up, Down and All Around: Controlling Atomic Placement in ALD
ALD Student Award Finalist Talk: Tuning Properties of Vapor Deposited ZIF-8 Thin Films With Preferred Orientation
ALE Student Award Finalist Talk: Reaction Pathways Leading to Anisotropic Pattering of Cu
ALE Student Award Finalist Talk: Thermal Atomic Layer Etching of Cobalt Using SO2Cl2 and P(CH3)3
ALD Student Award Finalist Talk: Insight into Film Growth Mechanisms in Polyurea Molecular Layer Deposition (MLD) Using New and Combined Precursors
Closing Remarks & Thank Yous
Sessions | Time Periods | Topics | Schedule Overview