ALD/ALE 2021 ALD Applications Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(630KB, Jun 9, 2021)
Topics
| Time Periods
| Schedule Overview
| Session Code | Session Name |
|---|---|
| AA1 | Energy: Catalysis and Fuel Cells |
| AA2 | Energy: Solar Energy Materials |
| AA3 | Energy: Batteries and Energy Storage |
| AA4 | Applications in ULSI FEOL: High-k |
| AA7 | Applications in ULSI BEOL: Interconnects, Diffusion Barriers, Low-k |
| AA8 | Memory Applications: DRAM |
| AA10 | Memory Applications: RRAM & Neuromorphic, MIM Capacitors |
| AA11 | Memory Applications: Other Non-Volatile Memories (MRAM, FeRAM, Phase Change,...) |
| AA12 | Display Applications: Thin Film Transistor, Diodes, Thin Film Encapsulation for OLEDs/QDs... |
| AA14 | Emerging: Optics/Optoelectronics/Metamaterials/Plasmonics |
| AA15 | Emerging: Medical/Healthcare/Pharmaceuticals |
| AA16 | Emerging: Others (Protective Coatings, Hardness, MEMs...) |
| AA17 | ALD Applications Poster Session |