ALD2019 Wednesday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
Session | Wednesday, July 24, 2019 | |||||||
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1:30 PM | 2:30 PM | |||||||
AA1-WeA |
Atomic Layer Deposited Nano-Coatings to Protect SrAl2O4 Based Long-Life Phosphors from Environmental Degradation
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Enhanced Interfacial Fracture Toughness of Polymer-Epoxy Interfaces using ALD Surface Treatments
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Atomic Layer Deposition of Pd on ZnO Nanorods for High Performance Photocatalysts
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Accelerating Light Beam (ALB) Generation through Dielectric Optical Device Fabricated by Low Temperature Atomic Layer Deposition (ALD)
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Tunable Plasmonic Colours Preserved and Modified by Atomic Layer Deposition of Alumina
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TFE of OLED Displays by Time-Space-Divided (TSD) PE-ALD and PE-CVD Hybrid System
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Tailoring the Ferroelectricity of ZrO2 Thin Films using Ultrathin Interfacial Layers Prepared by Plasma-Enhanced Atomic Layer Deposition
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Spin-Hall-Active Platinum Thin Films Grown Via Atomic Layer Deposition
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AA2-WeA |
Silicon-Based Low k Dielectric Materials with Remote Plasma ALD
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SiOC Films by PEALD with Excellent Conformality and Wet Etch Resistance
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ALD TiN for Superconducting Through-Silicon Vias
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Physical and Electronic Properties of Annealed ALD-deposited Ru from Ru(DMBD)(CO)3 and Oxygen
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Fluorine Free Boron-Containing Composite Layers for Shallow Dopant Source Applications
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Impact of Medium Energy Ions on the Microstructure and Physical Properties of TiN Thin Layers Grown by Plasma Enhanced Atomic Layer Deposition (PE-ALD).
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ALD Process Monitoring for 3D Device Structures
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EM1-WeA |
Rhenium(III)-based Ternary Oxides: Novel Materials from Straightforward Synthesis via ALD Comprising Uncommon Reaction Pathways
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Growth Bbehavior and Electronic Characterization of PbZrO3 and PbZrxTi1-xO3 Grown by Atomic Layer Deposition with Several Zr Precursors
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Understanding Growth Characteristics of ALD NiAlyOx: The Role of Ozone
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Atomic Layer Deposition of BxMg1-xO Films: Progress Towards Shallow Boron Doping
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Enhanced Doping Control of Metal Oxide Thin Films Using a Modified ALD Process
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As Deposited Epitaxial LaNiO3 and La(Ni,Cu)O3 with Controllable Electric Properties
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Time Dependence of Pyroelectric Response in Ferroelectric Hf0.58Zr0.42O2 Films
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Tailoring Nickel Oxide Conductivity by Introducing Transition Metals: From First-principles to Experimental Demonstration
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NS-WeA |
Modified ALD Process to Achieve Crystalline MoS2Thin Films
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Nucleation and Growth of ALD MoS2 Films on Dielectric Surfaces
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Plasma-Enhanced Atomic Layer Deposition of Transition Metal Dichalcogenides: From 2D Monolayers to 3D Vertical Nanofins
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Atomic Layer Deposition of Emerging 2D Semiconductors HfS2 and ZrS2
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Low Temperature ALD for Phase-controlled Synthesis of 2D Transition Metal (M=Ti, Nb) di- (MX2) and Tri- (MX3) Sulfides
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ALD Boron Nitride Coated and Infiltrated Carbon Materials for Environmental Applications
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