ALD2018 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, August 1, 2018
8:00 AM 9:00 AM 10:00 AM 11:00 AM
Growth Of Indium Oxide Thin Films Based On A Plasma Enhanced Atomic Layer Deposition Technique
Large-Area Atmospheric Pressure Spatial ALD for Display Applications
Amorphous Indium Zinc Tin Oxide (IZTO) Semiconductor Materials and the Associated Thin Film Transistor Properties Deposited by Atomic Layer Deposition
Evaluation of Si precursor for SiO2 OLED Encapsulation by PEALD
Hydrogen Barrier Properties of ALD Al2O3 with Different Oxidants
Flexible Al2O3/Organic Multilayer Moisture Barrier Films Deposited by Spatially Resolved ALD Processes in a Single Chamber
Optimization of Film Structure by Stress Engineering for Flexible Thin Film Encapsulation
A Condense Polymer-inorganic Hybrid Nanolayer with Extremely Low Gas Transmission Rate Behavior and Ultra-flexible Nature
SiN-Al2O3 Nano-laminates Fabricated with Combination of CVD-ALD Method for Encapsulation of Highly Stable Flexible OLED Electronics
Thermoelectric Device Based on ALD/MLD-grown ZnO and ZnO:benzene Thin Films on Flexible and Textile Substrates
Transparent Graphene Heater Improved by Defect Healing of Metal Atomic Layer Deposition
Surface Modification Studies and Stabilization of Perovskite Quantum Dots with Atomic Layer Deposition
Fabrication of TiO2 Interconnected Nanotubes by ALD and Synthesis of g-C3N4/Au/TiO2 Heterostructure for Photocatalytic Water Splitting
Nano-energetic Materials Fabricated by Atomic/Molecular Layer Deposition
Atomic Layer Deposition of Alumina on Lactose Particles for Modified Release: Effect of Co-reactants and Substrate Crystallinity
A High Vacuum Plasma Enhanced Atomic Layer Deposition System for Depositing Very Reactive Metals
Plasma Properties of High Pressure ALD
Remote Plasma Atomic Layer Deposition of Gallium Oxide Thin Films using Trimethylgallium and Oxygen Plasma
Impact of Substrate Biasing during Plasma-enhanced Atomic Layer Deposition on Dielectric Breakdown of Al2O3 Thin Film
Growth Mechanism of High-k Y2O3 on GaAs(001)-4×6 using in-situ Cycle-by-Cycle ALD and Synchrotron Radiation Photoelectron Spectroscopy
Role of Low and Medium Energy Ions in PEALD Processes
Energetic Ions during Plasma ALD and their Role in Tailoring Material Properties
Role of Plasma Chemistry on Structure and Properties of Low Resistivity PEALD TiN Films
Effect of Oxygen Plasma and Growth Temperature on the Densification of Plasma-Enhanced Atomic Layer Deposited Silicon Dioxide Film
On the Co-reactant for Atomic Layer Deposition of Metals: Hydrogen/Nitrogen-based Plasmas for Cobalt ALD
Plasma-enhanced Atomic Layer Deposition of Tungsten Films using Tungsten Chloride Precursor
Tailoring Molybdenum Carbide Properties by Plasma and Ion Energy Control during Plasma Enhanced ALD
Atmospheric-Pressure Plasma-Enhanced Spatial ALD of In2O3:H
Low-Temperature Plasma-Enhanced ALD of Highly Conductive Niobium Nitride Thin Films with RF Substrate Biasing
Low-temperature Plasma Assisted Atomic Layer Deposition of Cadmium Telluride
Improved Deposition Rate of Low T PEALD Silicon Nitride Using Amines
Improved Adhesion and Electrical Properties of Plasma-Enhanced ALD Platinum through Cycle-by-Cycle Hydrogen Plasma Treatment
Low Temperature SiNx Film Deposition by Plasma Enhanced Atomic Layer Deposition with Trisilylamine
Enhanced Thermal Stability of LTO Electrode by Atomic-Layer-Deposited Al2O3
Electrochemical Performance of Atomic Layer Deposited Zinc Oxysulfide Thin Film in Li-ion Battery
Interfacial and Surface Design of Electrode by ALD and MLD for Next-generation Batteries
Biodegradable ALD Materials for the Packaging of Thin Film Batteries for Implantable Medical Devices
Enhanced Conductivity in Thin-Film Solid-Composite Electrolytes for Lithium-Ion Batteries by Combining Molecular and Atomic Layer Deposition
Resolving the Mutual Contradiction between Porosity and Toughness of Carbon Textile for Flexible Supercapacitors
Atomically-Precise Interfacial Engineering of Energy Conversion and Storage Materials by ALD
Minimizing Polysulfide Shuttle Effect in Lithium-Ion Sulfur Batteries by Anode Surface Passivation via Atomic Layer Deposition
A Facial Way to Prepare Large Areal 3D Porous Carbon via Molecular Layer Deposition and its Application for Lithium Sulfur Batteries
Enhanced Metal-support Interaction of Ceria Supported Platinum Single Atoms and Subnanoclusters for Room Temperature CO Oxidation
DBD Plasma Assisted Atomic Layer Deposition Alumina Barrier Layer and its Applications
Sequential Infiltration Synthesis for sub 20 nm Thermal Scanning Probe Lithography Patterns
Fabrication of BN Coated Carbon Nanostructures using ALD Based on Polymer Derived Ceramics Route
Atomic Layer Deposition of Lead(II) Iodide
Crystalline High-k Dielectric Films on Atmospheric Plasma Treated Graphene by Atomic Layer Deposition
Sessions | Time Periods | Topics | Schedule Overview