ALD2018 Wednesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, August 1, 2018
1:30 PM 2:30 PM 3:30 PM
Oleo Sponge: Reusable Sorbent for Oil Spill Cleanup Fabricated using Sequential Infiltration Synthesis
Evaluation of Zinc Oxide Fabricated by Atomic Layer Deposition as an Antibacterial Coating under UV Light
ALD Enabled Non-linear Optical Properties at Substrate-film Interfaces
Bottom-up Fabrication of X-ray Optics using ALD
Thickness Optimization of Aluminum Oxide for High Secondary Electron Emission Deposited via Atomic Layer Deposition
Effect of Deposition and Annealing Condition on Atomic Layer Deposited SnO2 for Environmental Ozone Monitoring
Etch Behavior of Ti-based Oxide Grown by Atomic Layer Deposition for Spacer Application
Scaling Atomic Layer Deposition to Astronomical Sizes: Low-temperature Aluminum Oxide Deposited in a Meter-sized Chamber
Surface Treatment of Solid Oxide Fuel Cell Cathodes by Atomic Layer Deposition
Bottom-Up ALD Engineering of FexCo1-xSy for Electrocatalytic Hydrogen Evolution
Plasma Enhanced Atomic Layer Deposition of Iron Carbide for Electrocatalytic Hydrogen Evolution
Gadolinia-doped Ceria Thin Film Fabricated by Atomic Layer Deposition for Enhancing ORR Kinetics of LT-SOFC
Atomic Layer Deposition of Palladium Nanoparticles on Nickel for Direct Methanol Solid Oxide Fuel Cell Catalysts
Diffusion-Limited Atomic Layer Deposition: Realizing the Encapsulation of Homogeneous Catalysts
Ultrathin ALD Yttria-Stabilized Zirconia Overcoating on Metal Electrodes for Low Temperature Solid Oxide Fuel Cell
Catalyst Synthesis and Modification via Atomic Layer Deposition: From Supported Metal Catalysts to Complex Systems
Atomically Controllable Ru@Pt Core Shell Nanoparticles Towards PROX’s Reactions Modulated by Pt Shell Thickness
In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate
Growth Mechanisms and Diffusion Behavior of Molecular Layer Deposition Films Deposited by Cyclic Azasilanes, Maleic Anhydride, and Water
In-situ RAIRS Investigation of the Oxidation and Reduction of Cu using UV/O3 and Ethanol
Real Time GISAXS Study of the Effects of Plasma Gas Chemistry on Growth of InN Films by Atomic Layer Epitaxy
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Cobalt Thin Films using Cyclopentadienylcobalt-dicarbonyl and N2-H2 Plasma
A Surface Science Toolbox for Understanding Atomic Layer Epitaxy
Investigation of the Temperature Dependence of Plasma-assisted Atomic Layer Epitaxy Growth of InN on GaN using in situ Grazing Incidence Small-angle X-ray Scattering
In situ Investigations on the Crystal Structure Dependent ALD Film Growth of TiO2
Water Assisted ALD Process for Y2O3 Thin Films and Evaluation of the Y2O3 Containing Metal-insulator-capacitor Structures
New Plasma-enhanced Atomic Layer Deposition Process for SnO2: Process Development and Evaluation of SnO2 for TFT Applications
Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride using Pentachlorodisilane (PCDS) and Hexachlorodisilane (HCDS)
Physical, Chemical, and Electrical Properties of Molecular Layer Deposited Alucone Thin Films using Trimethyl-aluminum and Hydroquinone
Molecular Layer Deposition of Boron Carbide Thin Films
Achieving Room Temperature and Below Phase Transitions in ALD Doped VO2 Films
Ozone Based High Temperature Atomic Layer Deposition of SiO2 Thin Films
Atomic Layer Deposition of High-Tc Magnesium Diboride (MgB2) Film for Superconducting Radio-Frequency Particle Beam Accelerators
Commerical Production of ALD-Coated Powders and Polymers
Ruthenium: Advanced Nodes and Supply Chain Implications
An Alternative Precursor for Safe Deposition of Aluminum Oxide Thin Films
Application of PEALD Technique to the Fabrication of Vertical TFT for the Ultra High-Resolution Display
Effect of Substrate on MoS2 Deposited by Plasma-enhanced Atomic Layer Deposition
Single-crystal Ternary Perovskite YAlO3 Epitaxial Growth on GaAs and GaN via Y2O3 Template Overcoming a Large Film/Substrate Lattice Mismatch
Sessions | Time Periods | Topics | Schedule Overview