ALD2018 Wednesday Afternoon

Oleo Sponge: Reusable Sorbent for Oil Spill Cleanup Fabricated using Sequential Infiltration Synthesis

Evaluation of Zinc Oxide Fabricated by Atomic Layer Deposition as an Antibacterial Coating under UV Light

ALD Enabled Non-linear Optical Properties at Substrate-film Interfaces

Bottom-up Fabrication of X-ray Optics using ALD

Thickness Optimization of Aluminum Oxide for High Secondary Electron Emission Deposited via Atomic Layer Deposition

Effect of Deposition and Annealing Condition on Atomic Layer Deposited SnO₂ for Environmental Ozone Monitoring

Etch Behavior of Ti-based Oxide Grown by Atomic Layer Deposition for Spacer Application

Scaling Atomic Layer Deposition to Astronomical Sizes: Low-temperature Aluminum Oxide Deposited in a Meter-sized Chamber

Surface Treatment of Solid Oxide Fuel Cell Cathodes by Atomic Layer Deposition

Bottom-Up ALD Engineering of FexCo1-xSy for Electrocatalytic Hydrogen Evolution

Plasma Enhanced Atomic Layer Deposition of Iron Carbide for Electrocatalytic Hydrogen Evolution

Gadolinia-doped Ceria Thin Film Fabricated by Atomic Layer Deposition for Enhancing ORR Kinetics of LT-SOFC

Atomic Layer Deposition of Palladium Nanoparticles on Nickel for Direct Methanol Solid Oxide Fuel Cell Catalysts

Diffusion-Limited Atomic Layer Deposition: Realizing the Encapsulation of Homogeneous Catalysts

Ultrathin ALD Yttria-Stabilized Zirconia Overcoating on Metal Electrodes for Low Temperature Solid Oxide Fuel Cell

Catalyst Synthesis and Modification via Atomic Layer Deposition: From Supported Metal Catalysts to Complex Systems

Atomically Controllable Ru@Pt Core Shell Nanoparticles Towards PROX’s Reactions Modulated by Pt Shell Thickness

In Situ IR Spectroscopic Investigation of Thermal and Plasma-Enhanced ALD of Pt: Temperature Dependency of the Growth Rate

Growth Mechanisms and Diffusion Behavior of Molecular Layer Deposition Films Deposited by Cyclic Azasilanes, Maleic Anhydride, and Water

In-situ RAIRS Investigation of the Oxidation and Reduction of Cu using UV/O₃ and Ethanol

Real Time GISAXS Study of the Effects of Plasma Gas Chemistry on Growth of InN Films by Atomic Layer Epitaxy

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Cobalt Thin Films using Cyclopentadienylcobalt-dicarbonyl and N₂-H₂ Plasma

A Surface Science Toolbox for Understanding Atomic Layer Epitaxy

Investigation of the Temperature Dependence of Plasma-assisted Atomic Layer Epitaxy Growth of InN on GaN using in situ Grazing Incidence Small-angle X-ray Scattering

In situ Investigations on the Crystal Structure Dependent ALD Film Growth of TiO₂

Water Assisted ALD Process for Y₂O₃ Thin Films and Evaluation of the Y₂O₃ Containing Metal-insulator-capacitor Structures

New Plasma-enhanced Atomic Layer Deposition Process for SnO₂: Process Development and Evaluation of SnO₂ for TFT Applications

Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride using Pentachlorodisilane (PCDS) and Hexachlorodisilane (HCDS)

Physical, Chemical, and Electrical Properties of Molecular Layer Deposited Alucone Thin Films using Trimethyl-aluminum and Hydroquinone

Molecular Layer Deposition of Boron Carbide Thin Films

Achieving Room Temperature and Below Phase Transitions in ALD Doped VO₂ Films

Ozone Based High Temperature Atomic Layer Deposition of SiO₂ Thin Films

Atomic Layer Deposition of High-T_c Magnesium Diboride (MgB₂) Film for Superconducting Radio-Frequency Particle Beam Accelerators

Commerical Production of ALD-Coated Powders and Polymers

Ruthenium: Advanced Nodes and Supply Chain Implications

An Alternative Precursor for Safe Deposition of Aluminum Oxide Thin Films

Application of PEALD Technique to the Fabrication of Vertical TFT for the Ultra High-Resolution Display

Effect of Substrate on MoS₂ Deposited by Plasma-enhanced Atomic Layer Deposition

Single-crystal Ternary Perovskite YAlO₃ Epitaxial Growth on GaAs and GaN via Y₂O₃ Template Overcoming a Large Film/Substrate Lattice Mismatch