ALD2018 Atomic Layer Etching Sessions
Topic Abstract Book
(539KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| ALE1-MoA | Monday, July 30, 2018 1:30 PM | Plasma and/or Energy-enhanced ALE I |
| ALE2-MoA | Monday, July 30, 2018 4:00 PM | Plasma and/or Energy-enhanced ALE I |
| ALE-MoP | Monday, July 30, 2018 5:45 PM | Atomic Layer Etching Poster Session |
| ALE1-TuM | Tuesday, July 31, 2018 8:00 AM | ALE: Gas-phase and/or Thermal ALE |
| ALE2-TuM | Tuesday, July 31, 2018 10:45 AM | Modeling of ALE |
| ALE1-TuA | Tuesday, July 31, 2018 1:30 PM | Applications for ALE |
| ALE2-TuA | Tuesday, July 31, 2018 2:30 PM | Selective ALE |